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LEAP 5000®

3D Atom Probe Microscope with unmatched 3D sub-nanometer analytical performance

The LEAP 5000® is CAMECA's cutting-edge atom probe microscope, offering superior detection efficiency across a wide variety of metals, semiconductors and insulators: more than 40% extra atoms detected per nm3 analyzed.
  • Product overview +

    The LEAP 5000® collects nanoscale information from a microscale dataset in just a few hours and delivers improved compositional accuracy, precision and detection limits, enhanced sample throughput together with increased yield and ultimate reproducibility.

    • Optimized detection efficiency provides unparalleled sensitivity
    • Large Field-of-View and detection uniformity - the ultimate 3D spatial resolution
    • Excellent multi-hit detection capabilities for the most accurate compositional measurements
    • Fast and variable repetition rate for ultra-high speed data acquisition 
    • Robust & ergonomic platform for increased ease-of-use and reduced time-to-knowledge
    • Live-time monitoring to ensure the highest quality data in every measurement
    • Advanced laser control algorithms provide measurably improved sample yields

    The LEAP 5000® Family

    LEAP 5000 XS®
    The LEAP 5000 XS combines new flight path technology with enhanced detector performance to offer improved field of view whilst achieving unprecedented detection efficiency ~ 80%, the highest of any such analytical technique! In addition, the advanced laser pulse module capable of offering repetition rates of up to 2 MHz makes the LEAP 5000 XS the ultimate in efficiency and productivity.

    LEAP 5000 XR®
    The LEAP 5000 XR incorporates the advanced reflectron design and enhanced detector performance (detection efficiency increased to ~ 50%) and adds all the benefits of advanced laser pulsing capable of repetition rates of up to 500kHz. The LEAP 5000 XR is the most capable atom probe across the widest variety of research and development applications.

    LEAP 5000 R®
    An improved voltage pulsing system capable of 40% greater pulse amplitudes and pulse repetition rates up to 500 kHz together with a new advanced reflectron design and enhanced detector performance makes the LEAP 5000 R the most powerful voltage mode atom probe ever produced.
  • See what the LEAP Atom Probe can do +

  • Download documentation +

  • View Recent Webinars +

    • An Introduction to Atom Probe Tomography and its Applications

      Friday, April 19, 2019

      CAMECA's Dr. Katherine Rice presents an Introduction to Atom Probe Tomography in a webinar hosted by the Materials Research Society. If you're looking for an easy introduction to the technique, an overview of APT instrumentation and the benefits to your institution or organization, this webinar is a great starting point. Packed with examples, it's the perfect primer on this powerful technology. Please note, you'll need a (free) Materials Research Science account to watch.
      Duration : 61 minutes
      Click here to view
    • Atom Probe Analysis of Catalyst Materials PART 1

      Tuesday, March 3, 2020

      Aluminum Tracking in Steamed ZSM-5 Zeolites With assistance from Dr. Danny Perea et al. at PNNL; Professors Bert Weckhuysen and Dr. Joel Schmidt at Utrecht University, and Dr. Simon Bare, Stanford. This webinar incorporates materials from: NATURE COMMUNICATIONS | 6:7589 | DOI: 10.1038/ncomms8589 Angew. Chem. Int. Ed. 2016, 55, 11173 –11177 NATURE COMMUNICATIONS | 8: 1666| DOI: 10.1038/s41467-017-01765-0 M. K. Miller et al., Ultramicroscopy 2005, 102, 287 K. Thompson et al., Ultramicroscopy 2007, 107, 131 M. K. Miller et al. Microscopy & Microanalysis 2007,13(6), 428 D. J. Larson et al., Ultramicroscopy 1999, 79, 287 K. Thompson et al, Microscopy & Microanalysis 2006, 12(S2), 1736CD K. Thompson et al., Ultramicroscopy 2007, 107, 131
      Duration : 12 minutes
      Click here to view
    • 3D Reconstruction and Analysis of Semiconductor Devices

      Monday, July 9, 2018

      Semiconductor devices are some of the most complicated samples for Atom Probe Tomography. In this webinar, Hugues Francois Saint Cyr walks you through semiconductor sample preparation and analysis ensuring that you get the APT results you need from your semiconductor development.
      Duration : 40 minutes
      Click here to view
  • Video +

  • Scientific publications +

    The below graph illustrates the growth of Atom Probe Tomography.

    Adoption by the scientific community and publication rate have grown exponentially over the past 10 years, witnessing the coming of age of Atom Probe Tomography, the only microanaytical technique providing full insight into the nanostructures of materials. You may download a selection of APT publications at this link: APT publications - a selection.

    Growth of Atom Probe Tomography publications 

  • APT users around the world +

    A selection of Atom Probe Related Web Sites

    International Field Emission Society (IFES)

    The International Field Emission Society is an international scientific society, that aims to promote high field nanoscience and atom probe microscopy. At each IFES Symposium, organised every 2 years, the E.W. Müller Outstanding Young Scientist Award is given to the best orally-presented paper in a competition.

    Materials Physics Group, Rouen University, France
    The GPM is a joint University of Rouen-CNRS and INSA research unit led by Prof Didier Blavette. It is one of the largest groups of the atom probe community. CAMECA collaborates with GPM for the design and development of its atom probes.

    Oak Ridge National Laboratory, Microscopy Group, USA
    The Microscopy Group at ORNL specializes in the development and application of advanced electron microscopy, atom probe tomography, and surface science techniques for the sub-nm scale characterization of the microstructure, chemical nature, and composition of materials. Equipped with a CAMECA LEAP, scientists and engineers at ORNL greatly contribute to the advancement of 3DAP technology and applications.

    Geoscience Atom Probe, Curtin University, Australia
    The development of the Geoscience Atom Probe as part of the Advanced Resource Characterisation Facility, housed in the John de Laeter Centre at Curtin University, provides a unique focus on the development and application of this exciting technique to the Earth Science discipline.

    Northwestern University Center for Atom Probe Tomography (NUCAPT), USA
    The Seidman Research Group at Northwestern University, Illinois, uses a LEAP 4000X Si to study the chemical composition and evolution of precipitates, interfaces, and other nanoscale phenomena. The Seidman Group ranks among the top research teams involved in the investigation of nano-structured materials.

    Marquis Research Group, University of Michigan, Ann Arbor, USA
    Part of the Department of Materials Science & Engineering of the University of Michigan, and equipped with a LEAP 4000X-HR, the Marquis Research Group focuses on the experimental exploration of the atomic scale structures to understand materials behavior and develop more efficient materials and structures for energy applications.

    FIM & Atom Probe Group, Department of Materials at Oxford University, UK
    Over more than 40 years of history, the Oxford FIM and Atom Probe Group have been world leaders in the development of the atom probe technique and its application to materials science problems.

    ACMM, University of Sydney, Australia
    The Australian Centre for Microscopy & Microanalysis (ACMM) is the University of Sydney’s centralised microscopy facility. Directed by Prof. Simon Ringer, it provides Sydney’s research community with leading instruments and expertise for exploring the structure of samples, from physical to biological and everything in between, at length scales down to the molecular and atomic.

    Deakin University, Electron Microscope Facility, Victoria, Australia
    Housed in the Geelong Technology Precinct at the Geelong Waurn Ponds Campus, Deakin Electron Microscope Facility supports a wide range of research projects that lead and inspire innovations in materials science and engineering.

    Metallic Nanostructure Group of NIMS, Japan
    Dr. Hono's Atom Probe group is part of the Materials Engineering Laboratory within the National Institute for Materials Science (NIMS) in Tsukuba, Japan.

    Max-Planck-Institut für Eisenforschung, Düsseldorf, Germany
    MPI Düsseldorf's Atom Probe Tomography Group, under leadership from Dr. Pyuck-Pa Choi, conducts basic research on the mechanical properties of materials and their relationship to the underlying nano- and microstructures. It was established in 2009 in conjunction with the installation of a LEAP 3000X HR. MPI Dusseldorf is also one of the first owner of a LEAP 5000 latest generation atom probe.

    Microscopy and Microanalysis group, Chalmers University, Sweden
    Research projects conducted by the Microscopy and Microanalysis group aim at developing and improving a fundamental understanding of the fine-scale microstructure of technologically important materials, its manipulation and importance in determining the properties of materials.

    EMEZ - Electron Microscopy, Federal Institute of Technology, Zurich, Switzerland
    EMEZ is an interdisciplinary facility of ETH Zurich supporting vital research efforts and services for ETH members and visiting researchers as well as industry.

    POSTECH, Korea
    Pohang University of Science and Technology and National Center for Nanomaterial Technology (NCNT), under the leadership of Prof. Chan Gyung Park (pages in Korean).

    Thompson Research Group, University of Alabama, USA
    Professor Thompson’s research group addresses processing-microstructure-property interdependence by investigating phase transformation and phase stability in a variety of material systems at different length scales.

    Montanuniversität Leoben, Austria

    Dr. Francisca Mendez-Martin's team within the Department of Physical Metallurgy and Materials conducts studies in a wide field of topics: surface engineering, phase transformations, in-situ monitoring of microstructural changes during solidification and heat treatment of metallic materials, development of nanostructured material...

    King Abdullah University of Science and Technology (KAUST), Saudi Arabia
    Inaugurated in September 2009, KAUST has an impressive program to develop one of the world’s leading scientific research institutions. 2 of CAMECA's new generation Atom Probe models will be installed at one of KAUST's core research facility within the Materials Science & Engineering department, under leadership of Prof. Tala‘at Al-Kassab.

    Fraunhofer Center for Nanoelectronic Technologies, Dresden, Germany
    Located within the “Silicon Saxony”, Fraunhofer CNT provides ideal collaboration opportunities for research institutes and material/equipment manufacturers in the field of nanoelectronics. The LEAP 3000X installed at Fraunhofer CNT is dedicated to research in semiconducting materials, as well as hard coating, metallic glasses, and nuclear fusion materials.

    Université Paul Cézanne, Marseille, France
    The Reactivity and Diffusion at Interfaces Team under leadership from Dominique Mangelinck is part of IM2NP, a research institute supporting a wide range of programs including modelling, design, architecture, processes, materials and their physico-chemical properties.

    UCSB's Materials Department, Santa Barbara, California USA
    Widely recognized as one of the top materials research facilities in the world, UCSB' s Materials Department serves as the innovation engine for discoveries in new materials. Under leadership from Professor James S. Speck, it is equipped with a LEAP 3000X.
    Hosted by CAMECA Instruments Inc., the Atom Probe Tomography user's website provides APT users and system owners with a single place to get and share information.
  • Software +

    • AP Suite 6
      AP Suite 6

      The Atom Prober's Toolkit for Data Analysis Workstations: a user-friendly, collaborative platform to seamlessly manage your entire Atom Probe Tomography research projects within one single environment.

      Keep Reading

    • IVAS Software

      Specifically developed for the CAMECA Atom Probes, IVAS provides powerful visualization and analysis features to extract 1D, 2D and 3D quantitative information collected on APT instruments, quickly and easily.

      Keep Reading

  • Upgrade kits +

    Options for LEAP®

    Integrated Plasma Cleaner
    A fully-integrated, automated plasma cleaner offers both increased productivity and reduced cost of ownership for the LEAP system.

    Residual Gas Analyzer
    Allows partial pressure analysis of LEAP instrument. 

    LEAP 5000 VCTM
    The Vacuum and Cryo Transfer Module (VCTM) enables specimens to be transported between LEAP and ancillary workstations while maintaining both UHV and cryogenic conditions. The module utilizes a UHV-compatible portable chamber which is fully integrated (via a docking station) into the LEAP 5000. Note that the additional workstations must also be compatible with the VCTM and this is not included with this option. Please contact CAMECA sales for more details.

    Productivity Enhancement Package
    Extends the storage capacity of the LEAP system and includes a fully-integrated in situ heated carousel to reduce pump down times, increase specimen throughput and improve vacuum quality.

    Anti-vibration Package
    Active vibration isolation platform allowing the LEAP to be installed in environments not meeting vibration standards, this integrated solution combines active vibration cancellation together with an upgraded LEAP platform. Patented piezoelectric Technology cancels floor vibration in real time with active bandwidth starting at 0.6Hz.

    Seismic Kit
    Factory-fitted seismic restraint kit. Floor requirements must be met for purchase of this option.

    Field-Ion-Microscope (eFIM) Module
    Adds Field-Ion-Microscope (FIM) capability to LEAP system

    Options for LEAP® and EIKOS™

    Manual Electropolisher

    The manual electropolishing unit is designed to allow maximum flexibility for production of specimens from a wide variety of materials. The item includes power supply, chemical handling and all accessories required to prepare high quality atom probe specimens. (Optical microscope and Chemical reagents are not included.)

    Adv sample prep kit
    Advanced specimen preparation kit includes key components required for advanced FIB-based specimen preparation.

  • Technical notes +