SIMS & NanoSIMS

• Materials
• Geosciences
• Nuclears

• Stable isotopes
• Geochronology
• Trace elements
• Nuclear forensics

A PDF spreadsheet compiling scientific research articles using IMS Wf & SC Ultra data is available for download. 
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You are welcome to send us any missing references, pdf and supplements!
Please email cameca.info@ametek.com

Solid-phase epitaxial regrowth of phosphorus-doped silicon by nanosecond laser annealing. S. Kerdil`es, M. Opprecht, D. Bosch, M. Ribotta, B. Skl´enard, L. Brunet, P.P. Michalowski. Materials Science in Semiconductor Processing Volume 186, February (2025), 109043.
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Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions. A. Merkulov. J. Vac. Sci. Technol. B 42, 064005 (2025)

Fabrication and Characterization of Boron‑Implanted Silicon Superconducting Thin Films on SOI Substrates for Low‑Temperature Detectors. A. Aliane · L. Dussopt · S. Kerdilès · H. Kaya · P. Acosta‑Alba · N. Bernier ·A.‑M. Papon · E. Martinez · M. Veillerot · F. Lefloch. Journal of Low Temperature Physics (2024)
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MXenes with ordered triatomic-layer borate polyanion terminations. Dongqi Li, Wenhao Zheng, Sai Manoj Gali, Kamil Sobczak, Michal Horák, Josef Polčá, Nikolaj Lopatik, Zichao Li, Jiaxu Zhang, Davood Sabaghi, Shengqiang Zhou, Paweł P. Michałowski, Ehrenfried Zschech, Eike Brunner, Mikołaj Donten, Tomáš Šikola, Mischa Bonn, Hai I. Wang, David Beljonne, Minghao Yu, Xinliang Feng. ChemRxiv (2024)
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Deep-level defects induced by implantations of Si and Mg ions into undoped epitaxial GaN. Paweł Kamiński, Andrzej Turos, Roman Kozłowski, Kamila Stefańska-Skrobas, Jarosław Żelazko, and Ewa Grzanka. Sci Rep. (2024); 14: 14272
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Fabrication and Performance Evaluation of a Nanostructured ZnO-Based Solid-State Electrochromic Device. Marivone Gusatti, Daniel Aragão Ribeiro de Souza, Mario Barozzi, Rossana Dell’Anna, Elena Missale, Lia Vanzetti, Massimo Bersani, and Marcelo Nalin. ACS Appl. Mater. Interfaces (2024)
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Advanced SiGe: B Raised Sources and Drains for p-type FD-SOI MOSFETs. Jean-Michel Hartmann, Francois Aussenac, Olivier Glorieux, David Cooper, Sebastien Kerdilès, Zdenek Chalupa, Francois Boulard, Heimanu Niebojewski, Blandine Duriez, Thomas Bordignon, Sebastien Peru, Pawel Michałowski, Richard Daubriac, Fuccio Cristiano. ECS Transactions 114(2),185 (2024)
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Secondary ion mass spectrometry quantification of boron distribution in an array of silicon nanowires. Paweł Piotr Michałowski, Jonas Müller, Chiara Rossi, Alexander Burenkov, Eberhard Bär, Guilhem Larrieu, Peter Pichler. Measurement 211, 112630 (2023)
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Oxycarbide MXenes and MAX phases identification using monoatomic layer-by-layer analysis with ultralow-energy secondary-ion mass spectrometry. Paweł Piotr Michałowski, Mark Anayee, Tyler S Mathis, Sylwia Kozdra, Adrianna Wójcik, Kanit Hantanasirisakul, Iwona Jóźwik, Anna Piątkowska, Małgorzata Możdżonek, Agnieszka Malinowska, Ryszard Diduszko, Edyta Wierzbicka, Yury Gogotsi. Nature Nanotechnology 17, 1192-1197 (2022)
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Titanium pre-sputtering for an enhanced secondary ion mass spectrometry analysis of atmospheric gas elements. Paweł Piotr Michałowski. Journal of Analytical Atomic Spectrometry 35, 1047 (2020).
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Growth and thermal annealing for acceptor activation of p-type (Al)GaN epitaxial structures: Technological challenges and risks. Sebastian Złotnik, Jakub Sitek, Krzysztof Rosiński, Paweł Piotr Michałowski, Jarosław Gaca, Marek Wójcik, Mariusz Rudziński. Applied Surface Science 488, 688-695 (2019).
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Sodium enhances indium-gallium interdiffusion in copper indium gallium diselenide photovoltaic absorbers. D. Colombara, F. Werner, T. Schwarz, I. Cañero Infante, Y. Fleming, N. Valle, C. Spindler, E. Vacchieri, G. Rey, M. Guennou, M. Bouttemy, A. Garzón Manjón, I. Peral Alonso, M. Melchiorre, B. El Adib, B. Gault, D. Raabe, Phillip J. Dale & S. Siebentritt. Nature Communications volume 9, Article number: 826 (2018).
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Reproducibility of implanted dosage measurement with CAMECA Wf. Kian Kok Ong, Yun Wang and Zhiqiang Mo. IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (2017).
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Secondary ion mass spectroscopy depth profiling of hydrogen-intercalated graphene on SiC. Pawel Piotr Michalowski, Wawrzyniec Kaszub, Alexandre Merkulov and Wlodek Strupinski. Appl. Phys. Lett. 109, 011904 (2016).
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SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering. Viktoriia Gorbenko, Franck Bassani, Alexandre Merkulov, Thierry Baron, Mickael Martin, Sylvain David and Jean-Paul Barnes. J. Vac. Sci. Technol. B 34, 03H131 (2016).
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Ion beam characterizations of plasma immersion ion implants for advanced nanoelectronic applications. M. Veillerot, F. Mazen, N. Payen, J.P. Barnes, F. Pierre (2014), SIMS Europe 2014, September 7-9, 2014.
 
Influence of Temperature on Oxidation Mechanisms of Fiber-Textured AlTiTaN Coatings. V. Khetan, N. Valle, D. Duday, C. Michotte, M-P Delplancke-Ogletree, and P. Choquet. ACS Appl. Mater. Interfaces (2014), 6, 6, 4115–4125.
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Ag-Organic Layered Samples for Optoelectronic Applications: Interface Width and Roughening Using a 500 eV Cs+ Probe in Dynamic Secondary Ion Mass Spectrometry. P. Philipp, Quyen K. Ngo, M. Shtein, J. Kieffer, and T. Wirtz. Anal. Chem. 2013, 85, 1, 381–388.
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Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs. M.J.P. Hopstaken, M.S. Gordon, D. Pfeiffer, D.K. Sadana, T. Topuria, P.M. Rice, C. Gerl, M. Richter, C. Marchiori. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. Volume 28, Issue 6, 1287, 18 November 2010

Advanced SIMS quantification in the first few nm of B, P, and As Ultra Shallow Implants. A.Merkulov, P.Peres, J.Choi, F.Horreard, H-U.Ehrke, N. Loibl, M.Schuhmacher, Journal of Vacuum Science & Technology B. 28, C1C48 (2010) ; doi:10.1116/1.3225588 

Depth profiling of ultra-thin oxynitride date dielectrics by using MCs2+ technique. D.Gui, Z.X.Xing, Y.H.Huang, Z.Q.Mo, Y.N.Hua, S.P.Zhao and L.Z.Cha (2008), App. Surf. Science, Volume 255, Issue 4, Pages 1437-1439. doi:10.1016/j.apsusc.2008.06.047.

Short-term and long-term RSF repeatability for CAMECA SC Ultra SIMS measurements. M. Barozzi, D. Giubertoni, M. Anderle and M. Bersani. App. Surf. Science 231-232 (2004) 768-771

Toward accurate in-depth profiling of As and P ultra-shallow implants by SIMS. A. Merkulov, E. de Chambost, M. Schuhmacher and P. Peres. Oral presentation at SIMS XIV, San Diego, USA, Sep. 2003. Applied Surface Science 231–232 (2004) 640–644

Latest developments for the CAMECA ULE-SIMS instruments: IMS Wf and SC Ultra. E. de Chambost, A. Merkulov, P. Peres, B. Rasser, M. Schuhmacher. Poster for SIMS XIV, San Diego, USA, Sept 2003. Applied Surface Science 231–232 (2004) 949–953

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You are welcome to send us any missing references, pdf and supplements! Please email cameca.info@ametek.com.

Dynamic SIMS for materials analysis in nuclear science. P. Peres, S-Y Choi, F. Desse, P. Bienvenu, I. Roure, Y. Pipon, C. Gaillard, N. Moncoffre, L. Sarrasin, and D. Mangin
Journal of Vacuum Science & Technology B 36, 03F117 (2018); doi: 10.1116/1.5017027

SIMS analysis of irradiated HTR fuel. S. Brémier, M. Laurie, R. Hasnaoui and A. El Abjani (2015), SIMS XX Poster Presentation, Sept. 13-18, 2015.

Evidence of tellurium iodide compounds in apower-ramped irradiated UO2 fuel rod. L. Desgranges, Ch. Riglet-Martial, I. Aubrun, B. Pasquet, I. Roure, J. Lamontagne, T. Blay (2013), Journ al of Nuclear Materia ls, Volume 437, Issue 1-3, Pages 409-414. doi:10.1016/j.jnucmat.2013.02.059.

Measurement of energy spectra on irradiated polycrystalline UO2 samples using secondary ion mass spectrometry. I. Roure, B. Pasquet, L. Desgranges, Ph. Bienvenu (2012), Surface and Interface Analysis, Volume 45, Issue 1, Pages 427-429. DOI: 10.1002/sia.5115.

Microbeam analysis of irradiated nuclear fuel. C T Walker, S Brémier, P Pöml, D Papaioannou, P W D Bottomley (2012), EMAS 2011: 12th European Workshop on Modern Developments in Microbeam Analysis, IOP Conf. Series: Materials Science and Engineering, Volume 32, 012028. doi:10.1088/1757-899X/32/1/012028.

High burnup changes in UO2 fuels irradiated up to 83 GWD/T in M5® claddings. J. Noirot, I. Aubrun, L. Desgranges, K. Hanifi, J. Lamontagne, B. Pasquet, C. Valot, P. Blanpain, H. Cognon (2009), Nuclear Engineering and Technology, Volume 41, No.2, March 2009 – Special Issue on the Water Reactor Fuel Performance Meeting 2008.

SIMS characterisation of actinide isotopes in irradiated nuclear fuel. L. Desgranges, B. Pasquet, Ch. Valot, I. Roure (2009), Journal of Nuclear Materials, Proceedings of a Topical Conference on Plutonium and Actinides: Plutonium Futures - The Science 2008, Volume 385, Issue 1, Pages 99-102. doi:10.1016/j.jnucmat.2008.09.032.

SIMS analysis of an UO2 fuel irradiated at low temperature to 65 MWd/kgHM. C.T. Walker, S. Bremier, S. Portier, R. Hasnaoui, W. Goll (2009). Journal of Nuclear Materials, Volume 393, Issue 2, Pages 212-223. doi:10.1016/j.jnucmat.2009.06.017.

Investigation of the relative sensitivity factor for the quantification of ion microprobe results for Nd isotopes in simulated nuclear fuel. Stéphane Portier, Stéphane Brémier, Rachid Hasnaoui, Olivier Bildstein, Clive T. Walker (2008), Microchimica Acta, Volume 161, Issue 3-4, Pages 479-483. DOI10.1007/s00604-007-0895-8.

A method for the quantification of total xenon concentration in irradiated nuclear fuel with SIMS and EPMA. Lionel Desgranges, Christophe Valot, Bertrand Pasquet, Jérôme Lamontagne, Thierry Blay, Ingrid Roure (2008), Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms, Volume 266, Issue 1, Pages 147-154. doi:10.1016/j.nimb.2007.10.035.

Assessment of the Nd/U ratio for the quantification of neodymium in UO2. L. Desgranges, B. Pasquet, I. Roure, S. Portier, S. Brémier, C.T.Walker, R. Hasnaoui, D. Gavillet, M. Martin, L. Raimbault (2008), Applied Surface Science, Volume 255, Issue 4, Pages 863-865. doi:10.1016/j.apsusc.2008.05.196.

Detailed characterisations of high burn-up structures in oxide fuels. J. Noirot, L. Desgranges, J. Lamontagne (2008), Journal of Nuclear Materials, Volume 372, Issues 2-3, Pages 318-339. doi:10.1016/j.jnucmat.2007.04.037.

Study of structural material resulting from the nuclear fuel cycle using SEM-WDX, EPMA and SIMS techniques. Jérôme Lamontagne, Catherine Eysseric, Lionel Desgranges, Christophe Valot, Jean Noirot, Thierry Blay, Ingrid Roure, Bertrand Pasquet (2008), Microchimica Acta, Volume 161, Issue 3, Pages 355-362. DOI10.1007/s00604-007-0852-6.

SIMS analysis of 83Kr implanted UO2. S. Portier, S. Brémier, R. Hasnaoui, O. Bildstein, C.T. Walker (2008), Applied Surface Science, Volume 255, Issue 4, Pages 1323-1326. doi:10.1016/j.apsusc.2008.05.263.

Secondary ion mass spectrometry of irradiated nuclear fuel and cladding: An overview. S. Portier, S. Brémier, C.T. Walker (2007). International Journal of Mass Spectrometry, Volume 263, Issues 2-3, Pages 113-126. doi:10.1016/j.ijms.2007.01.016.

Fission Gas Bubbles Characterisation in Irradiated UO2 Fuel by SEM, EPMA and SIMS. Jérôme Lamontagne, Lionel Desgranges, Christophe Valot, Jean Noirot, Thierry Blay, Ingrid Roure, Bertrand Pasquet (2006), Microchimica Acta, Volume 155, Pages 183-187. DOI 10.1007/s00604-006-0540-y.

Installation of a Shielded SIMS for the Analysis of Irradiated Nuclear Fuels. Stéphane Brémier, Rachid Hasnaoui, Stéphane Portier, Olivier Bildstein, and Clive T. Walker. (2006), Microchimica Acta, Volume 155, Pages 113-120. DOI 10.1007/s00604-006-0527-8.

A shielded SIMS in CEA : a new tool for the low abundant isotopes characterization. L.Desgranges, B.Pasquet (2005), ATALANTE 2004, P2-17.
Characterisation of irradiated nuclear fuel with SIMS. L. Desgranges, Ch.Valot, B.Pasquet (2005), Applied Surface Science, Volume 252, Issue 19, Pages 7048-7050. doi:10.1016/j.apsusc.2006.02.256.

Detection of Gas Bubble by SIMS in Irradiated Nuclear Fuel. Jérôme Lamontagne, Jean Noirot, Lionel Desgranges, Thierry Blay, Bertrand Pasquet, Ingrid Roure (2004), Microchimica Acta, Volume 145, Issue 1, Pages 91-94. DOI 10.1007/s00604-003-0135-9.

Measurement of xenon in uranium dioxide (UO2) with SIMS. L. Desgranges, B. Pasquet (2004), Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. Volume 215, Issues 3-4, Pages 545-551. doi:10.1016/j.nimb.2003.08.033.

A new shielded SIMS instrument for analysis of highly radioactive materials. B. Rasser, L, Desgranges, B. Pasquet (2003), Applied Surface Science, Secondary ion mass spectrometry SIMS XIII, Volume 203-204, Pages 673-678. doi:10.1016/S0169-4332(02)00789-4.

One Year of Operation of the Shielded SIMS with Irradiated Materials in the LECA Facility. L.Desgranges, B.Pasquet (2003), Proceedings of the Plenary Meeting 2003, European Working Group " Hot Laboratories and Remote Handling".

Installation of a shielded SIMS in CEA Cadarache. L. Desgranges, B. Pasquet, B. Rasser (2001).