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Invizo 6000®

The 3D Atom Probe with the largest field of view

The Invizo 6000® 3D Atom Probe microscope introduces major technology breakthroughs to push the boundaries of atom probe analysis. Its ultra wide field of view flight path and unique dual-beam deep UV laser pulse system result in higher single-specimen yield and a greater analysis volume with improved reconstruction fidelity, allowing more information to be obtained from each dataset. The Invizo 6000® is an ideal choice for advanced research on a diverse set of applications.

  • Product overview +

    At the core of CAMECA’s Invizo 6000® 3D Atom Probe is a completely new counter electrode concept which, in addition to enabling ion optics with unprecedented APT field of view, allows the symmetric laser illumination of the specimen, thus leading to unrivaled analytical capabilities.

    The Invizo 6000® offers a unique combination of the largest field of view of all 3D Atom Probes, while maintaining a high mass resolving power (MRP) thanks to a novel double einzel lens technology. It also incorpororates an advanced 257.5 nm deep UV (DUV) laser module enabling dramatic improvements in specimen yield and data reconstruction quality.

    • Better control your experiment and access lower detection rates by capturing more of the evaporated surface to achieve better data quality and specimen yield
    • Improve your reconstruction accuracy though more uniform adsorption of the DUV laser and thermally-coincident dual sided illumination of the specimen
    • Capture larger volumes in less time to provide more data from your region of interest 
  • See what Invizo can do +

  • Download documentation +

  • View recent webinars +

    • Introduction of 6000 generation : Invizo 6000 & LEAP 6000 XR

      Monday, December 20, 2021

      Newest Generation of Atom Probe Tomography Instruments Build on History of Success.
      Following the introduction of the Local Electrode Atom Probe (LEAP) in 2003, Atom Probe Tomography (APT) has become a standard material science method enabling 3D nanoscale compositional characterization of metals and alloys, ceramics, semiconductors, biomaterials and geological materials. CAMECA, a business unit of AMETEK, Inc., proudly announces the introduction of two new atom probe tomography platforms, the Invizo 6000 and the LEAP 6000 XR.
      View this short webinar with a Q&A session.
      Duration: 30 minutes
      Click here to view
    • High Impact Research: Composition metrology and correlative microscopy of wide bandgap semiconductors with APT

      Monday, February 7, 2022

      In the last decade, atom probe tomography (APT) has emerged as a valuable tool in the study of III-N semiconductors. In optoelectronics, it has provided insights into the nanostructure of light emitting diodes (LEDs), laser diodes and microwires. In nano-electronics, it has allowed insights into doping and alloying effects in transistors. Coupled with other microscopy techniques (i.e., TEM, PL, CL) and theoretical modeling, the availability of three-dimensional compositional information of nitride heterostructures based on the APT data has had (and will continue to have) a profound impact on the design and development of devices.
      View this short webinar with a Q&A session.
      Duration: 50 minutes
      Click here to view
    • What to Expect When You're Expecting an Atom Probe

      Wednesday, February 2, 2022

      This webinar will discuss the typical process that happens with purchasing an atom probe microscope. We will discuss the motivation, the ability to get funding, the process of working with CAMECA, deciding what configuration you need, options, accessories and consumables as well as what happens when the crates show up on your loading dock and what you should have done before that happens. We will present best practices, equipment, and personnel you will need as well as common pitfalls that can complicate the whole process.
      View this short webinar with a Q&A session.
      Duration: 48 minutes
      Click here to view
    • An Introduction to Atom Probe Tomography and its Applications

      Friday, April 19, 2019

      CAMECA's Dr. Katherine Rice presents an Introduction to Atom Probe Tomography in a webinar hosted by the Materials Research Society. If you're looking for an easy introduction to the technique, an overview of APT instrumentation and the benefits to your institution or organization, this webinar is a great starting point. Packed with examples, it's the perfect primer on this powerful technology. Please note, you'll need a (free) Materials Research Science account to watch.
      Duration : 61 minutes
      Click here to view
  • Video +

  • Scientific publications +

    The below graph illustrates the growth of Atom Probe Tomography.

    Adoption by the scientific community and publication rate have grown exponentially over the past 10 years, witnessing the coming of age of Atom Probe Tomography, the only microanaytical technique providing full insight into the nanostructures of materials. You may download a selection of APT publications at this link: APT publications - a selection.

    Growth of Atom Probe Tomography publications 

  • APT users around the world +

    A selection of Atom Probe Related Web Sites

    International Field Emission Society (IFES)

    The International Field Emission Society is an international scientific society, that aims to promote high field nanoscience and atom probe microscopy. At each IFES Symposium, organised every 2 years, the E.W. Müller Outstanding Young Scientist Award is given to the best orally-presented paper in a competition.

    Materials Physics Group, Rouen University, France
    The GPM is a joint University of Rouen-CNRS and INSA research unit led by Prof Didier Blavette. It is one of the largest groups of the atom probe community. CAMECA collaborates with GPM for the design and development of its atom probes.

    Oak Ridge National Laboratory, Microscopy Group, USA
    The Microscopy Group at ORNL specializes in the development and application of advanced electron microscopy, atom probe tomography, and surface science techniques for the sub-nm scale characterization of the microstructure, chemical nature, and composition of materials. Equipped with a CAMECA LEAP, scientists and engineers at ORNL greatly contribute to the advancement of 3DAP technology and applications.

    Geoscience Atom Probe, Curtin University, Australia
    The development of the Geoscience Atom Probe as part of the Advanced Resource Characterisation Facility, housed in the John de Laeter Centre at Curtin University, provides a unique focus on the development and application of this exciting technique to the Earth Science discipline.

    Northwestern University Center for Atom Probe Tomography (NUCAPT), USA
    The Seidman Research Group at Northwestern University, Illinois, uses a LEAP 4000X Si to study the chemical composition and evolution of precipitates, interfaces, and other nanoscale phenomena. The Seidman Group ranks among the top research teams involved in the investigation of nano-structured materials.

    Marquis Research Group, University of Michigan, Ann Arbor, USA
    Part of the Department of Materials Science & Engineering of the University of Michigan, and equipped with a LEAP 4000X-HR, the Marquis Research Group focuses on the experimental exploration of the atomic scale structures to understand materials behavior and develop more efficient materials and structures for energy applications.

    FIM & Atom Probe Group, Department of Materials at Oxford University, UK
    Over more than 40 years of history, the Oxford FIM and Atom Probe Group have been world leaders in the development of the atom probe technique and its application to materials science problems.

    ACMM, University of Sydney, Australia
    The Australian Centre for Microscopy & Microanalysis (ACMM) is the University of Sydney’s centralised microscopy facility. Directed by Prof. Simon Ringer, it provides Sydney’s research community with leading instruments and expertise for exploring the structure of samples, from physical to biological and everything in between, at length scales down to the molecular and atomic.

    Deakin University, Electron Microscope Facility, Victoria, Australia
    Housed in the Geelong Technology Precinct at the Geelong Waurn Ponds Campus, Deakin Electron Microscope Facility supports a wide range of research projects that lead and inspire innovations in materials science and engineering.

    Metallic Nanostructure Group of NIMS, Japan
    Dr. Hono's Atom Probe group is part of the Materials Engineering Laboratory within the National Institute for Materials Science (NIMS) in Tsukuba, Japan.

    Max-Planck-Institut für Eisenforschung, Düsseldorf, Germany
    MPI Düsseldorf's Atom Probe Tomography Group, under leadership from Dr. Pyuck-Pa Choi, conducts basic research on the mechanical properties of materials and their relationship to the underlying nano- and microstructures. It was established in 2009 in conjunction with the installation of a LEAP 3000X HR. MPI Dusseldorf is also one of the first owner of a LEAP 5000 latest generation atom probe.

    Microscopy and Microanalysis group, Chalmers University, Sweden
    Research projects conducted by the Microscopy and Microanalysis group aim at developing and improving a fundamental understanding of the fine-scale microstructure of technologically important materials, its manipulation and importance in determining the properties of materials.

    EMEZ - Electron Microscopy, Federal Institute of Technology, Zurich, Switzerland
    EMEZ is an interdisciplinary facility of ETH Zurich supporting vital research efforts and services for ETH members and visiting researchers as well as industry.

    POSTECH, Korea
    Pohang University of Science and Technology and National Center for Nanomaterial Technology (NCNT), under the leadership of Prof. Chan Gyung Park (pages in Korean).

    Thompson Research Group, University of Alabama, USA
    Professor Thompson’s research group addresses processing-microstructure-property interdependence by investigating phase transformation and phase stability in a variety of material systems at different length scales.

    Montanuniversität Leoben, Austria

    Dr. Francisca Mendez-Martin's team within the Department of Physical Metallurgy and Materials conducts studies in a wide field of topics: surface engineering, phase transformations, in-situ monitoring of microstructural changes during solidification and heat treatment of metallic materials, development of nanostructured material...

    King Abdullah University of Science and Technology (KAUST), Saudi Arabia
    Inaugurated in September 2009, KAUST has an impressive program to develop one of the world’s leading scientific research institutions. 2 of CAMECA's new generation Atom Probe models will be installed at one of KAUST's core research facility within the Materials Science & Engineering department, under leadership of Prof. Tala‘at Al-Kassab.

    Fraunhofer Center for Nanoelectronic Technologies, Dresden, Germany
    Located within the “Silicon Saxony”, Fraunhofer CNT provides ideal collaboration opportunities for research institutes and material/equipment manufacturers in the field of nanoelectronics. The LEAP 3000X installed at Fraunhofer CNT is dedicated to research in semiconducting materials, as well as hard coating, metallic glasses, and nuclear fusion materials.

    Université Paul Cézanne, Marseille, France
    The Reactivity and Diffusion at Interfaces Team under leadership from Dominique Mangelinck is part of IM2NP, a research institute supporting a wide range of programs including modelling, design, architecture, processes, materials and their physico-chemical properties.

    UCSB's Materials Department, Santa Barbara, California USA
    Widely recognized as one of the top materials research facilities in the world, UCSB' s Materials Department serves as the innovation engine for discoveries in new materials. Under leadership from Professor James S. Speck, it is equipped with a LEAP 3000X.
    Hosted by CAMECA Instruments Inc., the Atom Probe Tomography user's website provides APT users and system owners with a single place to get and share information.
  • Software +

    • AP Suite 6
      AP Suite 6

      The Atom Prober's Toolkit for Data Analysis Workstations: a user-friendly, collaborative platform to seamlessly manage your entire Atom Probe Tomography research projects within one single environment.

      Keep Reading

    • IVAS Software

      Specifically developed for the CAMECA Atom Probes, IVAS provides powerful visualization and analysis features to extract 1D, 2D and 3D quantitative information collected on APT instruments, quickly and easily.

      Keep Reading

  • Upgrade kits +

    Options for LEAP®

    Integrated Plasma Cleaner
    A fully-integrated, automated plasma cleaner offers both increased productivity and reduced cost of ownership for the LEAP system.

    Residual Gas Analyzer
    Allows partial pressure analysis of LEAP instrument. 

    LEAP 5000 VCTM
    The Vacuum and Cryo Transfer Module (VCTM) enables specimens to be transported between LEAP and ancillary workstations while maintaining both UHV and cryogenic conditions. The module utilizes a UHV-compatible portable chamber which is fully integrated (via a docking station) into the LEAP 5000. Note that the additional workstations must also be compatible with the VCTM and this is not included with this option. Please contact CAMECA sales for more details.

    Productivity Enhancement Package
    Extends the storage capacity of the LEAP system and includes a fully-integrated in situ heated carousel to reduce pump down times, increase specimen throughput and improve vacuum quality.

    Anti-vibration Package
    Active vibration isolation platform allowing the LEAP to be installed in environments not meeting vibration standards, this integrated solution combines active vibration cancellation together with an upgraded LEAP platform. Patented piezoelectric Technology cancels floor vibration in real time with active bandwidth starting at 0.6Hz.

    Seismic Kit
    Factory-fitted seismic restraint kit. Floor requirements must be met for purchase of this option.

    Field-Ion-Microscope (eFIM) Module
    Adds Field-Ion-Microscope (FIM) capability to LEAP system

    Options for LEAP® and EIKOS™

    Manual Electropolisher

    The manual electropolishing unit is designed to allow maximum flexibility for production of specimens from a wide variety of materials. The item includes power supply, chemical handling and all accessories required to prepare high quality atom probe specimens. (Optical microscope and Chemical reagents are not included.)

    Adv sample prep kit
    Advanced specimen preparation kit includes key components required for advanced FIB-based specimen preparation.

  • Technical notes +