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IMS 7f-Auto

Versatile SIMS Tool: Reference Detection Sensitivity with High Throughput & Full Automation

The IMS 7f-Auto is the latest version of our successful IMS xf Secondary Ion Mass Spectrometer (SIMS) product line. Designed to deliver high precision elemental and isotopic analyses with increased ease-of-use and productivity, it has been optimized for challenging applications such as glass, metals, ceramics, Si-based, III-V and II-VI devices, bulk materials, thin films... fulfilling industry requirements for efficient device development and process control.
  • Product overview +

    Key analytical features for solving a wide range of analytical problems
    The IMS 7f-Auto offers unparalleled depth profiling capabilities with high depth resolution and high dynamic range. The high transmission mass spectrometer is combined with two reactive, high-density ion sources, O2+ and Cs+, thus providing high sputter rate and excellent detection limits. A unique optical design allows both direct ion microscopy and scanning microprobe imaging.

    Improved automation & operation efficiency
    The IMS 7f-Auto is equipped with a redesigned, in-line primary column for easier and faster primary beam tuning and optimized primary beam current stability. New automated routines minimize operator related biases and improve ease-of-use. A motorized storage chamber with automated load / unload of sample holders ensures high throughput through analysis chaining and remote operation.

    High reproducibility at high throughput
    Thanks to its new motorized storage chamber & sample transfer, the IMS 7f-Auto can analyze multiple samples in chained or remote mode. Measurements can be fully unattended and automated, with unequalled throughput and reproducibility. Ultimate reproducibility can be achieved (RSD < 0.5 %), together with excellent detection limits, high throughput and productivity (tool can be used 24h a day with minimum operator intervention).
  • View recent webinars +

    • Using SIMS for materials development of high-performance solid oxide fuel cells

      Wednesday, July 20, 2022

      Katherine Develos-Bagarinao will present her most recent research projects on SOFCs using Secondary Ion Mass Spectrometry (SIMS) as a primary characterization tool.
      Duration: 27 minutes
      Click here to view
    • Application of SIMS in Solar PV Research: The Role of Hydrogen in Crystalline Silicon Solar Cells

      Wednesday, February 9, 2022

      In this webinar, Dr Di Kang will present results suggesting that, to achieve the highest passivation quality, an optimum amount of hydrogen surrounding the interfacial SiOx is needed, while insufficient or excess hydrogen can both lead to degradation of poly-Si passivation.
      Duration : 37 minutes
      Click here to view
    • Dynamic SIMS for Semiconductors

      Thursday, September 16, 2021

      A review of a broad array of IC applications with Dynamic SIMS, from deep to ultra-shallow implant depth profiling in Si-based semiconductors to compositional analysis of thin multilayers in patterned wafer pads, optoelectronics, 2D and non-planar 3D structures. Speaker: Pawel Michałowski, expert-user of CAMECA SC Ultra SIMS at Łukasiewicz Research Network – Institute of Microelectronics and Photonics, Poland
      Duration : 20 minutes
      Click here to view
    • Optimization of the Detection Limits for Light Elements (H,C,O) using Dynamic SIMS

      Wednesday, January 22, 2020

      This webinar focuses on the optimization of the detection limits for light elements (hydrogen, carbon, and oxygen atmospheric species) in silicon-based materials using dynamic SIMS. Information on H, C an d O low-level impurities introduced during processing and/or ageing is of major importance for a better understanding of semiconductor device lifetime and failure modes. Dynamic SIMS plays an important role in evaluating the concentration of impurities in solid samples because of its high sensitivity and depth profiling capabilities with high depth resolution and throughput, and the IMS 7f-Auto is designed to achieve optimized detection limits for light elements. Data presented in this webinar shows that significant improvement of H, C, and O detection limits in Si is achieved using the pre-sputtering method. Results obtained using multiple sample holders and the automated storage chamber are also presented.
      Duration : 25 minutes
      Click here to view
    • Dynamic SIMS for Characterization of Nuclear Materials

      Tuesday, January 14, 2020

      In order to ensure longevity of structural nuclear materials and to improve knowledge on the mechanisms that occur during reactor accidents, it is of great importance to better understand diffusion and migration mechanisms of fission products in nuclear materials and fuel. To that purpose, SIMS analyses are performed on different materials after ion implantation with natural isotopes of high fission yield species (such as molybdenum, helium, xenon, iodine). Application of dynamic SIMS to the characterization of nuclear particles collected in nuclear facilities for safeguards purposes is also discussed.
      Duration : 30 minutes
      Click here to view
    • The Principles of Dynamic SIMS

      Monday, January 6, 2020

      This free on-demand webinar is an excellent introduction to the dynamic SIMS technique. Different practical aspects are discussed:
      • Choice of primary and secondary beam species
      • Relative sensitivity for various elements
      • Matrix effects
      • Depth resolution & Lateral resolution
      • Depth profiling (choice of impact energy & sputtering rate, calibration method)
      • Scanning ion imaging mode
      A summary of dynamic SIMS main analytical characteristics is provided at the end.
      Duration : 20 minutes
      Click here to view
  • See what the IMS 7f-Auto can do +

  • Documentation & case studies +

  • Video +

  • Scientific publications +

    An Excel spreadsheet compiling scientific research articles using the IMS xf (IMS 3f, 4f, 5f, 6f, 7f, IMS 7f-Auto, IMS 7f-GEO). The articles are ordered by main applications as below and are easily searchable with Excel word search functions:
    • Materials
    • Geosciences
    • Nuclears
    Download speadsheet here

    Do not hesitate to contact us at if you can not access some pdf files on your own. You are also more than welcome to send us any missing references, pdf and supplements!
  • Links to IMS users around the world +

  • Software +

    • WinCurve dataprocessing sofware

      Specifically developed for CAMECA SIMS instruments, WinCurve offers powerful data processing & visualization capabilities in a user-friendly environment.

      Keep Reading

    • WinImage Software
      WinImage II

      Specifically developed for CAMECA SIMS instruments, WinImage II offers powerful image visualization, processing & printing capabilities under PC-Windows™ Environment.

      Keep Reading

    • APM Software

      Automated Particle Measurement (APM) is CAMECA software tool allowing fast screening of millions of particles, particle detection and isotopic characterization.

      Keep Reading

  • Upgrade kits +

    Specific to IMS 6f users: extend the lifetime of your instrument with our IMS 6f overhaul program:
    IMS 6f ion microprobes are robust, but old instruments whose electronic components are becoming obsolete. To minimize the risk of long, non-scheduled downtime, CAMECA  offers an IMS 6f overhaul program, that will fully rejuvenate your instrument with a complete new electronics system, pumping and vacuum, new hardware, full automation, user-friendly acquisition and processing software, etc...
    Download the IMS 6f-E7 upgrade flyer for all details of this upgrade and its benefits in terms of performance, productivity, ease-of-use, and of course, uptime and sustainability.

    To view other available options, click on either of the components below:
    Automation & Software
    Specimen Chamber
    Optical System

    Automation & Software

    PC-Automation (6f / 7f equipped with SUN workstation)
    PC automation system to replace SUN system, allows full automation & unattended operation and greatly improves performance and throughput. For more information, download the IMS 6f PC-Automation Upgrade flyer.

    Post-treatment Station (6f / 6f-E7/ 7f)
    PC computer for off-line data processing (CAMECA software not included).

    Desk Control Duplication (7f with PC-Automation / 6f-E7)
    Instrument control from an operator room. Ensures optimized operation comfort when the lab is split in two parts.

    APM Software Licence (6f with PC-Automation / 6f-E7 /7f with PC-Automation)
    Automated Particle Measurement software program for fast screening of large numbers of particles and detection of specific elements or isotopes. More information.

    WinCurve Software Licence (offline) (6f / 7f / 6f-E7)
    Offers powerful SIMS data processing & graphing capabilities. More information.

    WinImage II Software Licence (offline) (6f / 7f / 6f-E7)
    Offers powerful SIMS image processing capabilities. More information.

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    Cs Ion Source Isolation (7f with PC-Automation)
    Isolation and Pumping of the Cesium Microbeam Source.

    Duo Accel/Decel (7f with PC-Automation)
    Low primary ion energy system for the duoplasmatron source.

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    Storage Chamber Upgrade (7f with PC-Automation / 6f-E7)
    Manual storage chamber with its load-lock designed to store up to six sample holders under high vacuum. Ensures substantial throughput improvements for applications that depend on the best UHV conditions. 

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    Specimen chamber

    Z-Motion (7f with PC-Automation / 6f-E7)
    Z-Axis manual adjustment for the sample stage.

    Turbospectro upgrade (7f with PC-Automation / 6f-E7)
    Turbomolecular pumps for the mass spectrometer (to replace the existing ion pumps, for optimized pumping speed in the mass spectrometer and improved abundance sensitivity while using the oxygen flooding.

    Digital Video Camera (7f with PC-Automation / 6f-E7)
    Numerical camera and LED sample illustration system (white light).

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    Secondary Optical System

    EM Detector Post-accelaration (7f with PC-Automation)
    Postacceleration for the electron multiplier detector. Increases sensitivity when analysing heavy elements and when running the mass spectrometer at low secondary extraction voltage (<3 kV).