ECR Sources

CAMECA ECR Technology (formerly Polygon Physics)

At the core of all CAMECA sources is a patented microwave discharge system that can ignite and maintain an electron cyclotron resonance (ECR) plasma at very low power consumption (~ 1W) and generate ion or electron beams for a wide range of applications.
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TES-GO

TES-GO is a mobile source under vacuum which can sustain beam energies up to 5kV.
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TES-40

TES-40 is based on a TES cavity mounted on a ConFlat CF40 flange and can sustain beam energies up to 5kV.
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TES-63

TES-63 is based on a TES cavity mounted on a ConFlat CF63 flange and can sustain beam energies up to 15kV.
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TES-100

TES-100 is based on a TES cavity mounted on a ConFlat CF100 flange and can sustain beam energies up to 30kV.
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HEXAR

CAMECA HEXAR is a broad beam ion source designed for surface processing in vacuum. HEXAR is a scalable concept that enables the fabrication of sources adapted to the treatment of a wide range of surface sizes. Typical applications are ion beam etching, surface cleaning, ion assisted deposition and ion beam sputter deposition.
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Faraday Cup

The CAMECA Faraday Cup is used to measure the ion or electron current delivered by particle sources. Mobile under vacuum via flexible connections to electronics, it enables more flexibility to suit specific applications.
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Choose your source

Our TES product line can address a wide range of applications and processes. Choose the model that best fits your needs!
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