At the core of all CAMECA electron and ion sources products is a patented microwave discharge system that can ignite and maintain an electron cyclotron resonance (ECR) plasma at very low power consumption (~ 1W). This means we can use simple low power transmitters similar to those used in cell phones.
The ECR concept, combined with the ultracompact design of the cavities, enables the use arrays of individually controlled cavities in order to create a plasma sheet of any dimension. By adding extraction optics we can transform these plasmas into beams of ions or electrons of any shape and size.
All based on this unique mono-cavity ECR technology, the CAMECA TES ion and electron sources are the smallest microwave plasma source on the market
Key features & benefits of CAMECA’s unique mono-cavity ECR technology
Highest uptime & reliability
TES is a family of ion and electron sources based on patented mono-cavity ECR technology. TES can operate at very low power (below 5W), removing the need for cooling of the source and eliminating all associated cooling issues.
TES products are extremely stable and have very long lifetimes: several models can run more than 15.000 hours continuous operation without any operator intervention nor performance decrease.
TES can operate on a very wide pressure spectrum, making it a reliable tool for any application from ultra-high vacuum to primary vacuum for processes requiring an external gas supply or a non-optimized pumping environment.
Ease of use & automation
CAMECA’s unique mono-cavity ECR technology allows for an easy start-up of the source by pressing only one button on our control software. Nominal stable performance is achieved less than one minute after source ignition. Source start-up can also be planned automatically at a given time.
TES is provided by default with a graphical interface to control the source, and with an API library allowing you to integrate easily the source code inside your machine control software.
Every TES source can integrate a pulsed beam option ensuring precise control of the beam over time.
Versatility
Every TES source can be configured to generate ions or electrons. A bipolar mode option is available on every TES model, allowing them to generate alternatively positive ions or electrons and negative ions. Our TES product line can thus address a wide range of applications in mass spectrometry, ion implantation, ion beam figuring, nuclear and atomic physics, and more.
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