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IMS 8f: A New Generation of Dynamic SIMS

Automated Dynamic SIMS for Semiconductor and Advanced Materials Characterization
IMS 8f
NanoSIMS Cryo on new horizon

NanoSIMS Cryo: Unlock Native Chemistry at the Nanoscale

NanoSIMS Cryo extends the capabilities of the NanoSIMS-HR by enabling analysis of samples in their native frozen-hydrated state.

NanoSIMS Cryo
Patented microwave discharge system for ECR plasma generation in CAMECA electron and ion sources.

ECR Sources: Explore the power of Technology

Ion & electron sources for implantation, surfaces, and physics - the smallest microwave plasma sources on the market
LEAP 3D Atom Probe instrument for Atom Probe Tomography offering atomic-scale 3D imaging and composition analysis.

High‑Resolution SIMS and APT for Semiconductor Materials

The only technique combining true 3D imaging with high‑precision chemical analysis.

CAMECA AT A GLANCE

CAMECA is a world leading supplier of microanalytical and metrology instrumentation for research and process control.

 

Our instruments measure elemental and isotopic composition in materials down to atomic resolution and equip government and university labs as well as high-tech industrial companies around the world. Learn how we address challenging characterization needs in diverse markets: semiconductor, nanotechnology and novel materials, nuclear science, energy, biology, environment, mining, geology.

 

CAMECA is also at the forefront of ion and electron source technology with TES - Polygon Physics, the most compact ECR source in the world. Discover ECR source applications.

Our Range of Products

Find the right product for your application

Applications

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Advanced Materials

Gain a deeper understanding of advanced materials used for transportation, energy production, aerospace, and even consumer products. 

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Environmental Science

From microbial ecology and oceanography to nuclear safeguards, SIMS and NanoSIMS are tools of choice for quantitative analysis.

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Geoscience

Analysis of stable and radiogenic isotopes, light elements, REE... CAMECA supports the geoscience community.

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Life Sciences

Intracellular metabolic pathways, DNA expression, virus penetration and drug localization... we enable important medical advancements.

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Metals

Our instruments are used worldwide for R&D as well as process control of metals and alloys for industrial applications.

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Mining

Assist miners and metallurgists in the discovery of new ore deposits and the improvement of mineral processing.

nuclear applications

Nuclear

Support nuclear science & industry: development of innovative alloys, exploration of radiation damage processes, nuclear safeguards.

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Semiconductor

Our nanoanalysis and metrology solutions enable the development and mass production of new generation electronic devices at the latest node.

APT-Scientific Publications

Investigation of phase change separation processes (APT)

Thanks to unique spatial resolution analytical capabilities (subnanometer lateral and depth resolution), the CAMECA Atom Probes perform benchmark atomic scale quantitative analysis in materials.
APT-Scientific Publications

Atomic scale characterization of dopants (APT)

As transistor structures continue to shrink to keep pace with Moore's Law the existing analysis and metrology techniques currently in use will no longer be sufficient to fully characterize the nanoscale devices. Atom probe has the unique capability to characterize the next-generation technology cycles by mapping the spatial distribution and chemical identity of dopants on the atomic scale.
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Rare Earth Element analyses (SIMS)

When analyzing Rare Earth Elements in mineral samples, one has to deal with several molecular interferences of extremely close masses which cannot be separated using typical high mass resolution conditions.
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Ion implantation

The goal of ion implantation is to add ions to the interior of a substrate to change its material properties. The incoming ions change the elemental composition, but they also induce a structural change because they transfer energy and momentum to the substrate.
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Learn from Experts

We offer training for all instruments and experience levels - online or at your lab - to help you work efficiently and get the most from your system.

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Need Support?

We offer a range of post-warranty service solutions to suit various customer requirements: several annual maintenance service contracts are available as well as attractive on-demand solutions, allowing our customers to focus on their core activity - and leave their maintenance needs and worries to us.