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SPC of Logic p-mos with AKONIS SIMS tool

Monday, March 13, 2023

Dopant concentration control in logic structures is one of the biggest analytical challenges for semiconductor manufacturers. In particular, our customers are in need of stable, automated Statistical Process Control of the most critical steps in logic p-mos production.
Thanks to our proven single detector technology, AKONIS ensures unequalled long-term stability on Boron in SiGe monitoring at customer site.

Watch our new video for full details!