TES-100
Compact ECR source on CF100 flange, up to 30kV beam
TES-100 is based on a TES cavity mounted on a ConFlat CF100 flange and can sustain beam energies up to 30kV.
Product Details
We offer two versions of TES-100:
The Ions High Brightness can include an Einzel lens to further increase brightness and modulate the beam shape. It is ideal for mass spectrometry, milling, etching, beam line, and ion implantation applications.
The Electrons version can be used for various applications requiring high energy electron beams up to 30kV (electrons chemistry, evaporation)
Adding the bipolar option allows you to alternatively generate ions and electrons, and thus to address various applications with a single source.
Benefits
Discover the key advantages that set our solution apart. From increased efficiency to exceptional support, these benefits are designed to deliver real value and help you achieve more with confidence.
Related Products
TES-40 is based on a TES cavity mounted on a ConFlat CF40 flange and can sustain beam energies up to 5kV.
TES-GO is a mobile source under vacuum which can sustain beam energies up to 5kV.
