TES-GO
Mobile ECR source, up to 5kV beam TES-GO is a mobile source under vacuum which can sustain beam energies up to 5kV.
Flexible cables connect TES-GO to a CF40 flange installed on the vacuum chamber. The source design includes a mounting bracket that can be customized on request. The source is meant to be attached on your movement stages (not included) allowing to insulate wide or precisely defined areas.
Product Details
TES-GO is available in three versions:
The Ions High Brightness version often comes along with an Einzel lens and is ideal for sputtering, milling, etching and figuring applications.
The Ions Broad Beam version is ideal for cleaning and polishing applications.
The Electrons version can be used as a neutralizer to generate a low energy electron beam for charge compensation or plasma chemistry studies up to 5kV.
Adding the bipolar option allows you to alternatively generate ions and electrons, and thus to address various applications with a single source.
Benefits
Discover the key advantages that set our solution apart. From increased efficiency to exceptional support, these benefits are designed to deliver real value and help you achieve more with confidence.
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