Invizo 6000

The 3D Atom Probe with the Largest field of View

 

The Invizo 6000™ 3D Atom Probe microscope introduces major technology breakthroughs to push the boundaries of atom probe analysis. Its ultra wide field of view flight path and unique dual-beam deep UV laser pulse system result in higher single-specimen yield and a greater analysis volume with improved reconstruction fidelity, allowing more information to be obtained from each dataset. The Invizo 6000 is an ideal choice for advanced research on a diverse set of applications.

Invizo 6000 instrument

Product Details

At the core of CAMECA’s Invizo 6000 3D Atom Probe is a completely new counter electrode concept which, in addition to enabling ion optics with unprecedented APT field of view, allows the symmetric laser illumination of the specimen, thus leading to unrivaled analytical capabilities.

 

The Invizo 6000 offers a unique combination of the largest field of view of all 3D Atom Probes, while maintaining a high mass resolving power (MRP) thanks to a novel double einzel lens technology. It also incorporates an advanced 257.5 nm deep UV (DUV) laser module enabling dramatic improvements in specimen yield and data reconstruction quality.

  • Better control your experiment and access lower detection rates by capturing more of the evaporated surface to achieve better data quality and specimen yield

  • Improve your reconstruction accuracy though more uniform adsorption of the DUV laser and thermally-coincident dual sided illumination of the specimen

  • Capture larger volumes in less time to provide more data from your region of interest

Benefits

Discover the key advantages that set our solution apart. From increased efficiency to exceptional support, these benefits are designed to deliver real value and help you achieve more with confidence.

gear
Largest APT field of view
gear
Dual deep-UV lasers
gear
Higher specimen yield
gear
Larger analysis volumes
gear
Improved reconstruction

Webinars

Illustration showing an interactive webinar with a presenter, live reactions, chat icons, and audience participation

Atom Probe Tomography of Porous Solid Oxide Fuel Cells

Join Lazar Vucicevic and Dr. Katherine Rice to discover how atom probe tomography reveals microstructural evolution in porous SOFC electrodes - and how new laser technology improves yield.

Illustration showing an interactive webinar with a presenter, live reactions, chat icons, and audience participation

High Impact Research: Composition Metrology & Correlative Microscopy of Wide Bandgap Semiconductors with APT

In the last decade, atom probe tomography (APT) has emerged as a valuable tool in the study of III-N semiconductors. In optoelectronics, it has provided insights into the nanostructure of light emitting diodes (LEDs), laser diodes and microwires. In nano-electronics, it has allowed insights into doping and alloying effects in transistors...

Illustration showing an interactive webinar with a presenter, live reactions, chat icons, and audience participation

An Introduction to Atom Probe Tomography and its Applications

CAMECA's Dr. Katherine Rice presents an Introduction to Atom Probe Tomography in a webinar hosted by the Materials Research Society. If you're looking for an easy introduction to the technique, an overview of APT instrumentation and the benefits to your institution or organization, this webinar is a great starting point. Packed with examples, it's the perfect primer on this powerful technology.

Illustration showing an interactive webinar with a presenter, live reactions, chat icons, and audience participation

Introduction of 6000 Generation : Invizo 6000 & LEAP 6000 XR

Following the introduction of the Local Electrode Atom Probe (LEAP) in 2003, Atom Probe Tomography (APT) has become a standard material science method enabling 3D nanoscale compositional characterization of metals and alloys, ceramics, semiconductors, biomaterials and geological materials. 

Illustration showing an interactive webinar with a presenter, live reactions, chat icons, and audience participation

What to Expect When You're Expecting an Atom Probe

This webinar will discuss the typical process that happens with purchasing an atom probe microscope. We will present best practices, equipment, and personnel you will need as well as common pitfalls that can complicate the whole process.

Downloads

Application Note

01 - Carbon Segregation with LEAP and STEM

PDF

07 – LED Device Engineering

PDF

11 - 3D FinFET: Analysis of a 14 nm Device

PDF

15 - Correlative Grain Boundary Characterization

PDF

16 - Optoelectronics: Dopant Distribution in ALD‑grown ZnO

PDF

18 - Paleoclimatology: Organic Matrices in Biogenic Carbonates

PDF

20 - APT‑STEM Imaging for Enhanced 3D Reconstruction

PDF

26 -Stronger High‑Temperature Light Alloys Enabled by APT

PDF

27 - Nanogeochronology by Atom Probe Tomography

PDF

32 - Biomedical: Developing APT for Bone Tissue Repair Medical Devices

PDF

33 - Grain Boundary Analysis in Ni‑based Superalloys

PDF

34 - Hydrogen Embrittlement Studies

PDF

37 – Off‑the‑Shelf FinFET Device Characterization by APT

PDF

Flyer

AP Suite 6: The Atom Prober's Toolkit

PDF

Project Plan Feature in AP Suite

PDF

Interview

Making Green Steels with Hydrogen

PDF

Technical Note

APT Specimen preparation: Electropolishing

PDF

FIB Mounting to Wire Substrates

PDF

Standard FIB Lift‑Out Sample Preparation Procedure for APT

PDF

Transmission EBSD of APT Specimens

PDF
APT Community people meeting

Visit our APT community 

Read testimonials and keep up to date with APT research