Brochure
CATALOG: World Leader in Electron Cyclotron Resonance (ECR) Sources
Discover how CAMECA ECR ion sources deliver high current, stable beams for advanced SIMS and isotope analysis....
ECR Community
Resources, support and the latest research on ECR sources
Serving the International research community
World leader in ECR Source Technology, Polygon Physics (now part of CAMECA) bringing decades of innovation and expertise analysis to meet the needs of the most prominent scientists at large corporations, major universities, academic institutions and government laboratories around the world. All based on this unique mono-cavity ECR technology, the CAMECA TES ion and electron sources are the smallest microwave plasma source on the market.
Applications
Application
Ion Beam Sputter Deposition for High-Quality Thin Films
Learn how ion beam sputter deposition delivers dense, smooth thin films with precise control over deposition parameters using advanced ECR technology....
Application
Ion Beam Sputtering for Etching, Cleaning, Polishing & Milling
Learn how ion beam sputtering enables precise cleaning, polishing, milling, and Nano-structuring with optimized removal rates and minimal surface damage....
Publications
ECR Sources Scientific Publications
Access a selection of scientific publications by users of CAMECA ECR sources. Explore research on electron cyclotron resonance sources for various applications....
Article
Ion Implantation for Material Property Modification
Learn how ion implantation alters composition and structure to enhance hardness, wear resistance, and other surface properties in advanced materials....
Publications
Below is a selection of publications by users of our ECR Sources:
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications. A. S. Stodolna, T. W. Mechielsen, P. van der Walle, C. Meekes, H. Lensen. Published Online: 6 August 2024. Read full article
Ion source developments to supply mono & multi charged ion beams to the new NHa C400 hadron-therapy system. L. Maunoury, P. Velten, X. Donzel, V. Engelen, G. Collignon, P. Sortais, J. Perrussel, P. Paliard and D. Bérard. Citation L. Maunoury et al. 2024 J. Phys.: Conf. Ser. 2743 012090. Read full article
Development of a high current electron beam facility for compact accelerator neutron source target thermal tests. J.F. Muraz, D. Santos, V. Ghetta, J. Giraud, O. Guillaudin, P. Sortais, T. Thuillier, J. Marpaud, M. Chala, M. Forlino, M. Hervé. Volume 1062, May 2024, 169214. Read full article
Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition. Chalisa Gier, Marwa Ben Yaala, Callum Wiseman, Sean MacFoy, Martin Chicoine, François Schiettekatte, James Hough, Sheila Rowan, Iain Martin, Peter MacKay, Stuart Reid, Volume 771, 30 April 2023, 139781. Read full article
Processing and characterization of a multi-beam sputtered nano-crystalline CoCrFeNi high-entropy alloy film. P. Nagy, N. Rohbeck, G. Roussely, P. Sortais, J.L. Lábárb, J. Gubicza, J. Michler, L. Pethö. Received 16 July 2019, Revised 31 January 2020, Accepted 11 February 2020, Available online 11 February 2020, Version of Record 29 February 2020. Read full article
Amorphous Silicon with Extremely Low Absorption: Beating Thermal Noise in Gravitational Astronomy. I. A. Birney, J. Steinlechner, Z. Tornasi, S. MacFoy, D. Vine, A. S. Bell3, D. Gibson, J. Hough, S. Rowan et al. P. Sortais, S. Sproules, S. Tait, I. W. Martin, and S. Reid1. Phys. Rev. Lett. 121, 191101 – Published 6 November 2018.
Read full article
Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings. Classical and Quantum Gravity, 35, 075001. (doi:10.1088/1361-6382/aaad7c). Vajente, G., Birney, R., Ananyeva, A., Angelova, S., Asselin, R., Baloukas, B., Bassiri, R., Billingsley, G., Fejer, M.M., Gibson, D., Godbout, L.J., Gustafson, E., Heptonstall, A., Hough, J., MacFoy, S., Markosyan, A., Martin, I.W., Martinu, L., Murray, P.G., Penn, S., Roorda, S., Rowan, S., Schiettekatte, F., Shink, R., Torrie, C., Vine, D., Reid, S., and Adhikari, R.X. 08 February 2018. Read full article
User Lists
CAMECA's ECR source customers are spread over all continents, with over 80% being industrials from the semiconductor, analytics, and healthcare sectors. Here are some of our academic customers:
- Afisy Technologies, Changsha, China
- Centre d’Élaboration de Matériaux et d’Études Structurales (CEMES), Toulouse, France
- Chimie des Interactions Plasma-Surface (ChIPS), Université de Mons, Belgium
- Howard Hughes Medical Institute, Maryland, USA
- Institut Laue-Langevin, Grenoble, France
- Institut Lumière Matière, Université Claude Bernard Lyon 1, France
- Institut de Physique Nucléaire d’Orsay, France
- Institut des Sciences Moléculaires d’Orsay, France
- Institute of Thin Films, Sensors and Imaging, University of the West of Scotland, UK
- Laboratoire de Physique Subatomique et de Cosmologie (CNRS/IN2P3), Grenoble, France
- Lawrence Livermore National Laboratory, California, USA
- Max-Planck Institute, Heidelberg, Germany
- Netherlands Organization for Applied Scientific Research (TNO), Delft, Netherlands
- Strathclyde University, Glasgow, UK
- TATA Institute for Fundamental Research, Hyderabad, India
- The Multi-Scale Laboratory of the Mechanics of Materials group at Eindhoven University of Technology, Netherlands
- University of Milano Bicocca, Italy
Explore Resources
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ECR Applications
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ECR Webinars
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ECR Tutorials
Find educations information with our Tutorials and Essential Knowledge Briefs
ECR Publications
Browse selected ECR publications
Service and maintenance
Get the right service package to suite your needs
Reliable, high‑quality data starts with consistent care, and our AMECare service and maintenance packages make that simple. Whether you prefer the peace of mind of an annual contract or the flexibility of on‑demand support, we have tailored solutions designed to fit your workflow, protect uptime, and extend the life of your equipment.