TES-40
Compact ECR source on CF40 flange, up to 5kV beam
TES-40 is based on a TES cavity mounted on a ConFlat CF40 flange and can sustain beam energies up to 5kV.
Product Details
TES-40 is available in three versions:
The Ions High Brightness version often comes along an Einzel lens and is ideal for sputtering, milling, etching and figuring applications.
The Ions Broad Beam version is ideal for cleaning and polishing applications.
The Electrons version can be used as a neutralizer to generate a low energy electron beam for charge compensation or plasma chemistry studies up to 5kV.
Adding the bipolar option allows you to alternatively generate ions and electrons, and thus to address various applications with a single source.
Benefits
Discover the key advantages that set our solution apart. From increased efficiency to exceptional support, these benefits are designed to deliver real value and help you achieve more with confidence.
Related Products
TES-GO is a mobile source under vacuum which can sustain beam energies up to 5kV.
