TES-63

TES-63 is available in three versions:

• The Ions Broad Beam version can address various applications such as sputtering, milling, cleaning, and polishing.

• The Ions High Brightness version can come single-handed or include an Einzel lens to increase brightness and modulate the beam shape. It is ideal for mass spectrometry, milling, etching, and beam line applications.

• The Electrons' version can be used for various applications requiring electron beams up to 15kV (electrons chemistry, cleaning, defects correction)

• TES-63 is the only TES model offering a scanner option, which allows you to precisely deflect the beam and browse over a given surface. The beam trajectory can follow a raster scan or an arbitrary curve thanks to a waveform generator.

Adding the bipolar option allows you to alternatively generate ions and electrons, and thus to address various applications with a single source.