Article
ECR Ion Sources for Nuclear and atomic physics
Explore how ECR ion sources enable low-emittance beams for accelerators and efficient gas ionization for mass spectrometry in nuclear and atomic physics....
Introduction to ECR Sources
Discover the technique
Electron Cyclotron Resonance (ECR)
At the core of all CAMECA electron and ion sources products is a patented microwave discharge system that can ignite and maintain an electron cyclotron resonance (ECR) plasma at very low power consumption (~ 1W). This means we can use simple low power transmitters similar to those used in cell phones.
All based on this unique mono-cavity ECR technology, the CAMECA TES ion and electron sources are the smallest microwave plasma source on the market
Key features & benefits of CAMECA’s unique mono-cavity ECR technology
Highest uptime & reliability
TES is a family of ion and electron sources based on patented mono-cavity ECR technology. TES can operate at very low power (below 5W), removing the need for cooling of the source and eliminating all associated cooling issues.
TES products are extremely stable and have very long lifetimes: several models can run more than 15.000 hours continuous operation without any operator intervention nor performance decrease.
TES can operate on a very wide pressure spectrum, making it a reliable tool for any application from ultra-high vacuum to primary vacuum for processes requiring an external gas supply or a non-optimized pumping environment.
Ease of use & automation
CAMECA’s unique mono-cavity ECR technology allows for an easy start-up of the source by pressing only one button on our control software. Nominal stable performance is achieved less than one minute after source ignition. Source start-up can also be planned automatically at a given time.
TES is provided by default with a graphical interface to control the source, and with an API library allowing you to integrate easily the source code inside your machine control software.
Every TES source can integrate a pulsed beam option ensuring precise control of the beam over time.
Versatility
Every TES source can be configured to generate ions or electrons. A bipolar mode option is available on every TES model, allowing them to generate alternatively positive ions or electrons and negative ions. Our TES product line can thus address a wide range of applications in mass spectrometry, ion implantation, ion beam figuring, nuclear and atomic physics, and more.
Featured Products
TES-GO
Mobile ECR source, up to 5kV beam TES-GO is a mobile source under vacuum which can sustain beam energies up to 5kV.
TES-40
Compact ECR source on CF40 flange, up to 5kV beam TES-40 is based on a TES cavity mounted on a ConFlat CF40 flange and can sustain beam energies up to 5kV
TES-63
Compact ECR source on CF63 flange, up to 15kV beam TES-63 is based on a TES cavity mounted on a ConFlat CF63 flange and can sustain beam energies up to 15kV
TES-100
Compact ECR source on CF100 flange, up to 30kV beam. TES-100 is based on a TES cavity mounted on a ConFlat CF100 flange and can sustain beam energies up to 30kV
HEXAR
Broad Beam ECR source for surface processing in vacuum HEXAR is composed of an hexagonal arrangement of mini microwave cavities that each operate an ECR discharge at ultra low RF power (a few Watts per cavity at 2.45 GHz)
Faraday Cup
The CAMECA Faraday Cup is used to measure the ion or electron current delivered by particle sources. Mobile under vacuum via flexible connections to electronics, it enables more flexibility to suit specific applications.
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