With Polygon Physics joining the CAMECA family at the end of 2024, we united two organizations driven by a shared passion for precision and innovation. The world leader in ECR sources and the world leader in SIMS & APT elemental & isotopic microanalysis solutions are one company.
The CAMECA Source Technology Center, located near Grenoble, aims to provide industry and research with the most advanced electron and ion source based on patented technologies and continuous innovation.
Our ECR sources differentiate themselves from the competition through:
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Miniaturization: the smallest ion sources on the market, in terms of external dimensions as well as power consumption;
- Performance: industry-leading short- and long-term stability;
- Lowest cost of ownership: lowest source operating and maintenance costs in the industry;
- Scalability: ability to add and integrate individual sources to build sources for any sample size/aspect ratio without compromising uniformity;
- Versatility: a wide range of applications from thin film deposition to surface modification, nuclear physics, ion implantation…
Fill in the form to download our ECR Sources catalog.
For more information, click here.