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The Electron Microprobe that brings EPMA to your fingertips

Since pioneering Electron Probe MicroAnalysis in the 1950’s CAMECA has released several generations of microprobes, all with a proven valuable track record for analytical performance and reliability. The new SXFive-TACTIS builds on this legacy to deliver enhanced imaging and quantitative analysis performance in a user-friendly environment.
  • Product Overview +

    A dual beginner / expert interface - ideal for multi-user facilities
    The SXFive-TACTIS dual interface has been specifically designed for multi-user facilities to take full advantage of a single tool. In beginner mode, the instrument configuration, operation as well as basic imaging and data processing are made easy thanks tp an intuitive touchscreen interface. In expert mode, the interface is designed for skilled users who can benefit from a full compliment of different tool parameters and software options.

    Enhanced BSE imaging, especially at low voltage
    SXFive-TACTIS is equipped with an additional BSE detector allowing superior image quality, especially at ultra low voltage (spatial resolution 15 nm or better at 5 kV). This new BSE Low kV detector will enable you to quickly and more accurately identify the area of interest in your sample, and thus take full advantage of the tool’s robust FE-EPMA performance, achieving better detection of trace elements.

    Integrated EDS hypermapping
    SXFive-TACTIS comes with a fully integrated Electron Dispersive Spectrometer hypermapping module making data processing and analysis faster and easier. Using the new EDS HyperMap module, you can collect the full EDS spectrum for each pixel and extract quantitative results simultaneously.

    EPMA at your fingertips...
    With its unique, innovative touchscreen interface and many other productivity and ease-of-use enhancements, SXFive-TACTIS brings EPMA to your fingertips while not compromising on analytical performance, resolution or sensitivity.

    • “X Live” feature allowing the acquisition of real-time WDS and EDS X-ray images in one click, producing a rapid yet meaningful overview of the specimen composition, either in composite or superposed mode
    • full remote control, including SEM imaging, allowing users to run experiments from their smart phone, tablet, or remote computer.
    • ShuttleXpress, a new, ergonomic controller for comfortable and efficient workflow
    • A redesigned, comprehensive online help for easy access and continuous support during tool set-up and analyses.
  • See what the SXFive-TACTIS can do +

  • Documentation +

  • Scientific publications +

    See below a selection of scientific publications by users of CAMECA EPMA.
    Click on your field of interest:
    - Mineralogy/Geology
    - Geochronology
    - Archeology
    - Nuclear sciences
    - Metals
    - Biology / Life sciences
    - Trace elements
    - Quantification
    - Light elements / Soft X-rays
    - Small areas
    - Intrumentation


    Halogens in hydrothermal sphalerite record origin of ore-forming fluids. M. Frenzel, Nigel J. Cook, Cristiana L. Ciobanu, Ashley D. Slattery, Benjamin P. Wade, Sarah Gilbert, Kathy Ehrig, Mathias Burisch, Max R. Verdugo-Ihl, Panagiotis Voudouris. Geology (2020) 48 (8): 766–770. Read full article

    The First Find of Cr2O3 Eskolaite Associated with Marble-Hosted Ruby in the Southern Urals and the Problem of Al and Cr Sources. A. Kissin, I. Gottman, S. Sustavov, V. Murzin, D. Kiseleva. Minerals 2020, 10(2), 101. Read full article

    In-situ measurements of magmatic volatile elements, F, S, and Cl, by electron microprobe, secondary ion mass spectrometry, and heavy ion elastic recoil detection analysis. Estelle F. Rose-Koga, Kenneth T. Koga, Jean-Luc Devidal, Nobumichi Shimizu, Marion Le Voyer, Celia Dalou, Max Döbeli. American Mineralogist (2020) 105 (5): 616–626. Read full article

    Discovery of kyanite in typically cordierite/sillimanite-bearing low- to medium-pressure pelitic granulites from the Jiaobei terrain, North China Craton. Yi Zou, Mingguo Zhai, Ross N. Mitchell, Lei Zhao, Ligang Zhou, Bo Liu, Yuquan Wang, Mengdie Chen. Precambrian Research, Volume 342, (2020), 105677. Read full article

    Magmatic evolution and post‑crystallization hydrothermal activity in the early Cretaceous Pingtan intrusive complex, SE China: records from apatite geochemistry. Xiaobing Zhang, Feng Guo, Bo Zhang, Liang Zhao, Yangming Wu, Guoqing Wang, Melesse Alemayehu. Contributions to Mineralogy and Petrology (2020) 175:35. Read full article

    Geochemistry of Gold Ores Mined During Celtic Times from the North-Western French Massif Central. S. Baron, C. G. Tămaș, M. Rivoal, B. Cauuet, P. Télouk & F. Albarède. Scientific Reports volume 9, Article number: 17816 (2019). Read full article

    Minor elements in olivine inspect the petrogenesis of orogenic peridotites. Bin Su, Yi Chena, Qian Mao, Di Zhanga, Li-Hui Jia, Shun Guo. Lithos, Volumes 344–345, (1 November 2019), Pages 207-216. Read full article

    Lake sediments with Azorean tephra reveal ice-free conditions on coastal northwest Spitsbergen during the Last Glacial Maximum. Willem G. M. van der Bilt, and Christine S. Lane. Science Advances (23 Oct 2019) Vol. 5, no. 10, eaaw5980. Read full article

    An experimental study of dissolution and precipitation of forsterite in a thermal gradient: implications for cellular growth of olivine phenocrysts in basalt and melt inclusion formation. M. Laumonier, D. Laporte, F. Faure, A. Provost, P. Schiano & K. Ito. Mineralogy and Petrology (October 2019). Read full article

    Crystal scavenging from mush piles recorded by melt inclusions. P. E. Wieser, M. Edmonds, J. Maclennan, F. E. Jenner & B. E. Kunz. Nature Communications volume 10, Article number: 5797 (2019). Read full article

    Diamond-inclusion system recording old deep lithosphere conditions at Udachnaya (Siberia). F. Nestola, G. Zaffiro, M. L. Mazzucchelli, P. Nimis, G. B. Andreozzi3, B. Periotto, F. Princivalle, D. Lenaz, L. Secco, L. Pasqualetto, A. M. Logvinova, N. V. Sobolev, A. Lorenzetti7 & J. W. Harris. Scientific Reports volume 9, Article number: 12586 (2019). Read full article

    Magmatic Processes Associated with Oceanic Crustal Accretion at Slow-spreading Ridges: Evidence from Plagioclase in Mid-ocean Ridge Basalts from the South China Sea. Fan Yang, Xiao-Long Huang, Yi-Gang Xu and Peng-Li He. Journal of Petrology, Volume 60, Issue 6, June (2019), Pages 1135–1162. Read full article

    Plume-ridge interaction in the South China Sea: Thermometric evidence from Hole U1431E of IODP Expedition 349. Fan Yang, Xiao-Long Huang, Yi-Gang Xu, Peng-Li He. Lithos, Volumes 324–325, January (2019), Pages 466-478. Read full article

    Sulfide Mineralization in the Carbonatites and Phoscorites of the Guli Massif, Polar Siberia, and Their Noble-Metal Potential. N. V. Sorokhtina et al., Geochemistry International volume 57, pages 1125–1146 (2019). Read full article

    Clinopyroxene megacrysts from Marion Island, Antarctic Ocean: evidence for a late stage shallow origin. R. James Roberts et al., Mineralogy and Petrology (2019) 113:155–167.

    Diffusion‑controlled crack propagation in alkali feldspar. E. Petrishcheva et al., Physics and Chemistry of Minerals volume 46, pages15–26(2019)

    Immiscible hydrous Fe–Ca–P melt and the origin of iron oxide-apatite ore deposits.
     T. Hou, B. Charlier, F. Holtz, I. Veksler, Z. Zhang, R. Thomas & O. Namur. Nature Communications volume 9, Article number: 1415 (2018). Read full article

    Formation of massive iron deposits linked to explosive volcanic eruptions. J. Tomás Ovalle, N. L. La Cruz, M. Reich, F. Barra, A. C. Simon, B. A. Konecke, M. A. Rodriguez-Mustafa, A. P. Deditius, T. M. Childress & D. Morata. Scientific Reports volume 8, Article number: 14855 (2018). Read full article

    New evidence for Palaeoproterozoic High Grade Metamorphism in the Trivandrum Block, Southern India. Harley S.L. and Nandakumar V., Precambrian Resaerch 280 (2016), Pages 120-138

    Accessory Mineral Behaviour in Granulite Migmatites: a Case Study from the Kerala Khondalite Belt, India. Harley S.L. and Nandakumar V (2014), Journal of Petrology, Volume 55, Issue 10, Pages 1965-2002. DOI: 10.1093/petrology/egu047

    Opaque minerals, magnetic properties, and paleomagnetism of the Tissint Martian meteorite. Jérôme Gattacceca, Roger H. Hewins, Jean-Pierre Lorand, Pierre Rochette, France Lagroix, Cécile Cournède, Minoru Uehara, Sylvain Pont, Violaine Sautter, Rosa. B. Scorzelli, Chrystel Hombourger, Pablo Munayco, Brigitte Zanda, Hasnaa Chennaoui, Ludovic Ferrière. Meteoritics & Planetary Science 1-18 (2013)

    Anomalous sulphur isotopes in plume lavas reveal deep mantle storage of Archaean crust. Rita A. Cabral, Matthew G. Jackson, Estelle F. Rose-Koga, Kenneth T. Koga, Martin J. Whitehouse, Michael A. Antonelli, James Farquhar, James M. D. Day, Erik H. Hauri. NATURE 496, 490-493 (25 April 2013)

    How continuous and precise is the record of P–T paths? Insights from combined thermobarometry and thermodynamic modelling into subduction dynamics (Schistes Lustrés, W. Alps). A. Plunder, P. Agard, B. Dubacq, C. Chopin, M. Bellanger. Journal of Metamorphic Geology (April 2012), v.30, issue 3, p. 323-346, DOI: 10.1111/j.1525-1314.2011.00969.x

    Evaporation and recondensation of sodium in Semarkona Type II chondrules. Roger H. Hewins, Brigitte Zanda, Claire Bendersky. Geochimica et Cosmochimica Acta, Volume 78, 1 February 2012, Pages 1-17, ISSN 0016-7037, 10.1016/j.gca.2011.11.027.

    Subduction interface processes recorded by eclogite-facies shear zones (Monviso, W Alps). S. Angiboust, P. Agard, H. Raimbourg, P. Yamato, B. Huet, Lithos, Volume 127, Issues 1–2, November 2011, Pages 222–238 

    Minerals of Britain and Ireland. Tindle, A.G. Terra Publishing, Hemel Hempstead, Hertfordshire. 624 pp. (2008) 

    Gold mineralization within the Witwatersrand Basin, Sout Africa: evidence for a modified placer origin, and the role of the Vredefort impact event. C. L. Hayward, W. U. Reimold, R. L. Gibson & L. J. Robb. Geological Society, London, Special Publications v. 248; p. 31-58; DOI: 10.1144/GSL.SP.2005.248.01.02 (2005)

    Liddicoatite and associated species from the Mc Combe spodumene-subtype rare-element granitic pegmatite, Northwestern Ontario, Canada. Tindle, A.G., Selway, J.B. and Breaks, F.W., Can. Mineral. 43, 769-793 (2005) 

    Tourmaline in petalite-subtype granitic pegmatites: evidence of fractionation and contamination from the Pakeagama Lake and Separation Lake areas of NW Ontario, Canada. Tindle, A.G., Breaks, F.W. and Selway, J.B. Can. Mineral. 40, 753-788 (2002) 

    Columbite-tantalite mineral chemistry from rare-element granitic pegmatites: Separation Lake area, N.W. Ontario, Canada. Tindle, A.G. and Breaks, F.W., Mineralogy & Petrology 70, 165-198 (2000) 

    Tantalum mineralogy of rare-element granitic pegmatites from the Separation Lake area, NW Ontario, Canada. Tindle, A.G. and Breaks, F.W. Ontario Geological Survey, Open File Report 6022, 378pp (2000) 

    A Reappraisal of the Pressure-Temperature Path of Granulites from the Kerala Khondalite Belt, Southern India. V. Nandakumar and Simon Leigh Harley. The Journal of Geology 108(6):687-703 · November 2000

    Oxide minerals of the Separation Rapids Rare-Element Granitic Pegmatite Group, northwestern Ontario. Tindle, A.G. and Breaks, F.W., Can. Mineral. 36, 609-635 (1998) 

    Wodginite-group minerals from the Separation Rapids Rare-Element Granitic Pegmatite Group, northwestern Ontario. Tindle, A.G., Breaks, F.W. and Webb, P.C., Can. Mineral. 36, 637-658. (1998)

    • Fe2+ and Fe3+

    Accurate determination of ferric iron in garnets. Ryan J. Quinn, John W. Valley, F. Zeb Page, John H. Fournelle, American Mineralogist, Volume 101, pages 1704–1707. (2016) 

    Aluminum and iron behavior in glasses from destabilized spinels: A record of fluid/melt-mineral interaction in mantle xenoliths from Massif Central, France. Michel Fialin, Christiane Wagner, American Mineralogist, Volume 100, pages 1411–1423. (2015) 

    Determination of Fe3+/Fe using the electron microprobe: A calibration for amphiboles. William M. Lamb, Renald Guillemette, Robert K. Popp, Steven J. Fritz, Gregory J. Chmiel, American Mineralogist, Volume 97, pages 951–961. (2012) 

    Iron speciation using electron microprobe techniques: application to glassy melt pockets within a spinel lherzolite xenolith. Michel Fialin, Christiane Wagner, M.-L. Pascal, Mineralogical Magazine, April 2011, Vol. 75(2), pp. 347–362. (2011) 

    Trace element partitioning during partial melting of carbonated eclogites. T. Hammouda, B.N. Moine, J.L. Devidal, C. Vincent. Physics of the Earth and Planetary Interiors, Volume 174, Issues 1–4, (May 2009), Pages 60-69. Read full article

    Quantitative electron microprobe analysis of Fe3+/ΣFe: Basic concepts and experimental protocol for glasses. Michel Fialin, Antoine Bézos, Christiane Wagner, Veronique Magnien, Eric Humler, American Mineralogist, Volume 89, pages 654–662. (2004) 

    Quantification of Fe2+/Fe3+ by Electron Microprobe Analysis – New Developments. H. E. Höfer, Hyperfine Interactions 144/145: 239–248. (2002) 

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    A Mineralisation Age for the Sediment-Hosted Blackbush Uranium Prospect, North-Eastern Eyre Peninsula, South Australia. Urs Domnick, Nigel J. Cook, Cristiana L. Ciobanu, Benjamin P. Wade, Liam Courtney-Davies, and Russel Bluck. Minerals (2020), 10(2), 191. Read full article

    Halogens in hydrothermal sphalerite record origin of ore-forming fluids. M. Frenzel, Nigel J. Cook, Cristiana L. Ciobanu, Ashley D. Slattery, Benjamin P. Wade, Sarah Gilbert, Kathy Ehrig, Mathias Burisch, Max R. Verdugo-Ihl, Panagiotis Voudouris. Geology (2020) 48 (8): 766–770. Read full article

    Chemical, isotopic and amino acid composition of Mukundpura CM2.0 (CM1) chondrite: Evidence of parent body aqueous alteration. N.G. Rudraswami, A.K. Naik, R.P. Tripathi, N. Bhandari, S.G. Karapurkar, M. Shyam Prasad, E.V.S.S.K. Babu, U.V.R. Vijaya Sarathi. Geoscience Frontiers, Volume 10, Issue 2, (March 2019), Pages 495-504. Read full article

    Relics of a Paleoproterozoic orogen: New petrological, phase equilibria and geochronological studies on high-pressure pelitic granulites from the Pingdu-Laiyang areas, southwest of the Jiaobei terrane, North China Craton. 
    Yi Zou, Mingguo Zhai, Ligang Zhou, Lei Zhao, Junsheng Lu, Yuquan Wang, Houxiang Shan. Precambrian Research, Volume 322, (March 2019), Pages 136-159. Read full article

    EPMA monazite geochronology of the granulites from Daltonganj, eastern India and its correlation with the Rodinia supercontinent. Ravi Ranjan Kumar & S B Dwivedi. Journal of Earth System Science volume 128, Article number: 234 (2019). Read full article

    Analytical Protocol for U-Th-Pb Chemical Dating of Monazite using CAMECA SXFive EPMA Installed at the Mantle Petrology Laboratory, Department of Geology, Banaras Hindu University, Varanasi, India. Mayuri Pandey, Dinesh Pandit, Devsamridhi Arora, N. V. Chalapathi Rao & N. C. Pant. Journal of the Geological Society of India volume 93, pages 46–50(2019). DOI: 10.1007/s12594-019-1119-7

    The giant monazite crystals from Manangotry (Madagascar). J-M Montel, D. Razafimahatratra, P. De Parseval, F. Poitrasson, B. Moine, A-M Seydoux-Guillaume, R. Pik, N. Arnaud, F. Giberth. Chemical Geology, Volume 484, 5 May (2018), Pages 36-50. Read full article

    Improving U-Th-Pb electron microprobe dating using monazite age references.
    Patrik Konečný, Monika A.Kusiak, Daniel J.Dunkley. Chemical Geology 484 (2018) 22-35.

    Electron-microprobe dating of monazite:
    The story. Jean-Marc Montel, Takenori Kato, Masaki Enami, Alain Cocherie, Friedrich Finger, Michael Williams, Michael JercinovicChemical Geology 484 Page 4-15 (2018) 22-35.

    Electron Microprobe Petrochronology. Williams, M.L., Jercinovic, M.J., Mahan, K.H., and Dumond, G. (2017) Reviews in Mineralogy and Geochemistry 83; 153-182.

    Contributions of U-Th-Pb dating on the diagenesis and sediment sources of the lower group (BI) of the Mbuji-Mayi Supergroup (Democratic Republic of Congo). C. François et al. Precambrian Research 298 (2017) 202–219

    The Shallow Plumbing System of Piton de la Fournaise Volcano (La Re¤union Island, Indian Ocean) Revealed by the Major 2007 Caldera-Forming Eruption.
    A. Di Muro et al. Journal of Petrology, Volume 55, Issue 7, 1 July 2014, Pages 1287–1315,

    Limitations of chemical dating of monazite. Frank S. Spear, Joseph M. Pyle, Daiele Cherniak, Chemical Geology 266, pp 227-239 (2009) 

    Dating metamorphic reactions and fluid flow: application to exhumation of high-P granulites in a crustal-scale shear zone, western Canadian Shield. Mahan KH, Goncalves P, Williams ML, Jercinovic MJ (2006) Journal of Metamorphic Geology 24:193-217.

    Electron probe (Ultrachron) microchronometry of metamorphic monazite: Unraveling the timing of polyphase thermotectonism in the easternmost Wyoming Craton (Black Hills, South Dakota). Dahl, P.S. et al., American Mineralogist, 90, pp 1712-1728 (2005)

    Analytical perils (and progress) in electron microprobe trace element analysis applied to geochronology: Background acquisition, interferences, and beam irradiation effects. M. J. Jercinovic and M. L. Williams, American Mineralogist (2004)

    Microprobe monazite geochronology: putting absolute time into microstructural analysis. M. L. Williams and M. J. Jercinovic, Journal of Structural Geology, 24, pp 1013-1028 (2002)
    Electron microprobe dating of monazite. J. M Montel, S. Foret, et al, Chemical Geology 131,  pp 37–53 (1996)

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    FIB-FESEM and EMPA results on Antoninianus silver coins for manufacturing and corrosion processes. M.T. Doménech-Carbó, F. Di Turo, N. Montoya, F. Catalli, A. Doménech-Carbó & C. De Vito. Scientific Reports volume 8, Article number: 10676 (2018). Read full article

    Microstructure and chemical composition of Roman orichalcum coins emitted after the monetary reform of Augustus (23 B.C.). M. Di Fazio, A. Candida Felici, F. Catalli & C. De Vito. Scientific Reports volume 9, Article number: 12668 (2019). Read full article

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    Nuclear sciences

    Hafnium oxidation at high temperature in steam. S. Guilbert-Banti, A. Viretto, M. Barrachin, C. Tanguy, M. Steinbrück, J. Stuckert. Journal of Nuclear Materials, 550 (2021) 152901. Read full article

    MOX fuel microstructural evolution during the VERDON-3 and 4 tests. C. Le Gall, S. Reboul, L. Fayette, T. Blay, I. Zacharie-Aubrun, I. Félines, K. Hanifi, I. Roure, P. Bienvenu, F. Audubert, Y. Pontillon, J-L Hazemann. Journal of Nuclear Materials. Volume 531, 1 April 2020, 152015. Read full article

    Fission product speciation in the VERDON-3 and VERDON-4 MOX fuels samples. C. Le Gall, S. Reboul, L. Fayette, T. Blay, I. Zacharie-Aubrun, I. Félines, K. Hanifi,
    I. Roure, P. Bienvenu, F. Audubert, Y. Pontillon, J-L Hazemann. Journal of Nuclear Materials. Volume 530, March 2020, 151948. Read full article

    Electron probe microanalysis of irradiated FUTURIX-FTA U-Pu-Zr alloy with added minor actinides. Karen E. Wright, Jason M.Harp and Luca Capriotti. Journal of Nuclear Materials. Volume 526, 1 December 2019, 151745. Read full article

    Influence of hydrogen on the oxygen solubility in Zircaloy-4. S. Guilbert-Banti , P. Lacote, G. Taraud, P. Berger, J. Desquines, C. Duriez. Journal of Nuclear Materials, 469 (2016) 228-236.
    Read the full article

    Heat capacity of Bi2UO6.
    K. Popa, O. Beneš, P. E. Raison, J-C. Griveau, P. Pöml, E. Colineau, R.J.M. Konings, J. Somers. Journal of Nuclear Materials, Vol. 465, p. 653-656, doi:10.1016/j.jnucmat.2015.06.055 (2015)

    ECRIX-H Irradiation: Post-Irradiation Examinations and Simulations. S. Béjaoui, J. Lamontagne, E. Esbelin, J.M. Bonnerot, E. Brunon, P. Bourdot, Y. Pontillon. Presentation at FP7 FAIRFUELS Workshop, Stockholm, Sweden, February 2011

    Chemical States of Fission Products and Actinides in Irradiated Oxide Fuels Analyzed by Thermodynamic Calculation and Post-Irradiation Examination. K. Kurosaki, K. Tanaka, M. Osaka, Y. Ohishi, H. Muta, M. Uno, S.Yamanaka. Progress in Nuclear Science and Technology, Vol. 2, p.5-8 (2011) 

    Microstructural evolution and Am migration behavior in Am-containing MOX fuels at the initial stage of irradiation.
    K. Tanaka, S. Miwa, I. Sato, M. Osaka, T. Hirosawa, H. Obayashi, S. Koyama, H. Yoshimochi, K. Tanaka. Presentation at the 10th OECD Nuclear Energy Agency Information Exchange Meeting on Actinide and Fission Product Partitioning and Transmutation, Mito, Japan, October 2008

    On the Oxidation State of UO2 Nuclear Fuel at a Burn-Up of Around 100 MWd/kgHM.
    C.T. Walker, V.V. Rondinella, D. Papaioannou, S. Van Winckel, W. Goll, R. Manzel. Journal of Nuclear Materials, Vol. 345, p. 192–205 (2005)

    Analysis of High Radioactive Materials in Irradiated DUPIC SIMFUEL Using EPMA. Jung, Yang Hong; Yoo, Bang Ok; Joo Yong Sun; Kim, Hee Mun; Jung In Ha; Kim, Myung Han. Journal of the Korean Radioactive Waste Society, Vol. 2(2), p. 125-133 (2004)

    Multiple voltage electron probe microanalysis of fission gas bubbles in irradiated nuclear fuel. M. Verwerft. Journal of Nuclear Materials, Vol. 282, p. 97-111, doi:10.1016/S0022-3115(00)00421-9 (2000)

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    Sol–Gel Treatments to Flame Retard PA11/Flax Composites. F. Samyn , M. Vandewalle, S. Bellayer and S. Duquesne. Fibers 2019, 7(10), 86. Read full article

    Aluminum/Carbon Composites Materials Fabricated by the Powder Metallurgy Process. A. Veillère, H. Kurita, A. Kawasaki, Yongfeng Lu, J-M Heintz, and J-F Silvain. Materials 2019, 12(24), 4030. Read full article

    Atmospheric pressure plasma spraying of silane-based coatings targeting whey protein fouling and bacterial adhesion management.
     S. Zouaghi, T. Six, S. Bellayer, Y. Coffinier, M. Abdallah, N-E Chihib, C. André, G. Delaplace, M. Jimenez. Applied Surface Science Volume 455, (15 October 2018), Pages 392-402. Read full article

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    Biology / Life sciences

    Distinguishing geology from biology in the Ediacaran Doushantuo biota relaxes constraints on the timing of the origin of bilaterians. Cunningham JA, Thomas CW, Bengtson S, Kearns SL, Xiao S, Marone F, Stampanoni M, Donoghue PC. Proc Biol Sci. 2012 Jun 22;279(1737):2369-76 (2012)

    In situ identification and X-ray imaging of microorganisms distribution on the Tatahouine meteorite. Lemelle L, Salome M, Fialin M, Simionovici A , Gillet P. Spectrochimica Acta Part B-Atomic Spectroscopy, vol. 59, p. 1703-1710 (2004)

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    Trace elements

    Rutile records for the cooling history of the Trans-North China orogen from assembly to break-up of the Columbia supercontinent. C. Wang, Y-J Lai, S. F. Foley, Y. Liu, E. Belousova, K. Zong, Z. Hu. Precambrian Research. Volume 346, 15 August 2020, 105763. Read full article

    Multipoint Background Analysis: Gaining Precision and Accuracy in Microprobe Trace Element Analysis. J.M. Allaz, M.L. Williams, M. J. Jercinovic, K. Goemann et J. Donovan. Volume 25, Numéro 1, 2019 , pp. 30-46. Read full article

    Determination of Nb, Ta, Zr and Hf in micro-phases at low concentrations by EPMA.
    F. Kalfoun, C. Merlet, and D. Ionov, Mikrochimica Acta, 139, pp 83–91 (2002) 
    Advances in electron microprobe trace-element analysis. B. W. Robinson and J. Graham, Journal of Computer-Assisted Microscopy, vol. 43, p. 263–265 (1992)

    Electron microprobe determination of minor and trace transition elements in silicate minerals: a method and its application to mineral zoning in the peridotite nodule PHN 1611. C. Merlet and J. L. Bodinier, Chemical Geology, 83, pp 55–69 (1990)

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    The tectono-metamorphic evolution of metasedimentary rocks of the Nampo group outcropped in the area of the Daecheon Beach and Maryangri, Seocheon-gun, Chungcheongnam-do. Yong-Sun Song, Jungyoun Choi, and Kye-Hun Park. Jour. Petrol. Soc. Korea Vol.17, N° 1, p 1-15 (2008) (article in Korean)

    Assessment of the primary structure of slabs and the influence on hot- and cold-rolled strip structure. Hubert Presslinger, Michael Mayr, Ernst Tragl, Christian Bernhard. Steel Research Int. 77 N02 (2006)

    Capability and uncertainty in multilayer quantitative procedure with Electron Probe Microanalysis. C. Merlet, Proceed. of Microscopy and Microanalysis, Edited by E. Voelkl, D. Piston, R. Gauvin, A. J. Lockley, G. W. Bailey, and S. Mckernan, Microscopy and Microanalysis, Vol 8, supp.2, Cambridge University press, pp 428–429 (2002)
    Study of surface modification of uranium and UFe2 by various surface analysis techniques. O. Bonino, O. Dugne, C. Merlet, E. Gat, Ph. Holliger, and M. Lahaye, Journal of Nuclear Materials 294, 3, pp 305 (2001)

    The dependence of the optical energies on InGaN composition. K. P. O'Donnell, et al, Materials Science and Engineering: B82, pp 194–196 (2001)

    EPMA sputter depth profiling: a new technique for quantitative in-depth analysis of layered structures. P. Karduck and A. von Richthofen, Proc. 29th annual MAS meeting, pp 205–206 (1995)

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    Light elements / Soft X-rays

    Low-voltage electron-probe microanalysis of Fe–Si compounds using soft X-rays. P. Gopon, J. Fournelle, P.E. Sobol and X. Llovet. Microsc Microanal 2013;19:1698–708.

    Electron probe microanalysis near phase boundaries of Cu-TiN system. C. Fournier, S. Lequeux, C. Fucili, F. Le Guyadec, and C. Merlet, Proceedings 3rd Regional Workshop EMAS, Barcelona, Spain, p 43 (1998)

    Electron-probe microanalysis of ultra-light elements in multiphase diffusion couples. W. Lengauer, J. Bauer, M. Bohn, H. Wiesenberger, and P. Ettmayer, Proc. 4th EMAS European workshop, p 374 (1995)

    Electron probe microanalysis of submicron coatings of ultralight elements. P. Willich and R. Bethke, Microbeam Analysis, 2, pp 45–52 (1993)

    EPMA studies of L-emission spectra and measurements on Mn La self-absorption coefficient as indicator of its chemical state in minerals. I. P. Laputina, V. A. Batyrev, V. V. Changulov, and I. B. Baranova, Proc. 4th EMAS European workshop, pp 370 (1995)

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    Small areas

    High spatial resolution electron probe microanalysis of tephras and melt inclusions without beam-induced chemical modification. C. Hayward, The Holocene, published online 8 August 2011  

    Identification by EPMA of submicron borides in joints of nickel base superalloys. C. Pascal, C. Merlet, R. M. Marin-Ayral, J. C. Tédenac, and B. Boyer, Mikrochimica Acta vol. 145, Numbers 1-4, pp 147–151 (2004)

    Submicrometer phase chemical composition analysis with an electron probe microanalyser. F. C. Y. Wang, X-Ray Spectrometry, 23, pp 203–207 (1994)  

    Scanning electron microscopy techniques in the study of atmospheric aerosol particles. J. C. Seymour, R. N. Guillemette, and N. W. Tindale, Proceedings of the 28th Annual MAS Meeting, Ed. J.J. Friel, New Orleans, LA, pp 65–66 (1994)

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    Quantitative Analysis and High Resolution X-ray Mapping with a Field Emission Electron Microprobe. C. Hombourger, M. Outrequin. Microscopy Today, Volume 21, Number 3, pp 10-15, May 2013

    Renewal of the shielded Electron Probe Microanalyser (EPMA) in the CEA LECA-STAR hot laboratory: safety and technical improvements.
    J. Lamontagne, T. Blay, P. Navarra. Poster presentation at Hotlab conference, Dimitrovgrad, Russia, 2010

    Cathodoluminescence imaging and titanium thermometry in metamorphic quartz. F. S. Spear, D. A. Wark, J. metamorphic Geol., 27, pp 187-205, (2009)

    Constructing ternary phase diagrams directly from EPMA compositional maps. D.R. Snoeyenbos, D. A. Wark, J. C. Zhao, Microscopy and Microanalysis 14 (Suppl. 2), pp 1276-1277 (2008)
    > Download abstract

    Imaging of cathodoluminescence zoning in calcite by scanning electron microscopy and hyper-spectral mapping. M. Lee, R.W. Martin, C. Trager-Cowan and P.R. Edwards, Journal of Sedimentary Research 75, pp 313-322 (2005)

    An expert system for EPMA. Cecile Fournier, Claude Merlet, Pierre F. Staub, Olivier Dugne. Mikrochim. Acta 132, pp 531-539 (2000)

    Spectral decomposition of wavelength dispersive X-ray spectra: implications for quantitative analysis in the electron probe microanalyser. G. Rémond, J. L. Campbell, R. H. Packwood, and M. Fialin, Scanning Microscopy Supplement, 7, pp 89–132 (1993)

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  • Some of our EPMA users +

    A selection of CAMECA SX users

    University of Edinburgh, Scotland
    The Electron Probe Microanalysis Facility features a world-class Cameca SX100 instrument and is located in the Grant Institute, School of GeoSciences.

    University of Massachusetts, Department of Geosciences, USA
    UMass is home to the "Ultra-Chron" project, a collaboration between CAMECA and the University of Massachusetts for the development of a microprobe optimized for geochronology and trace element analysis. The microprobe facility at UMass has a main focus on monazite dating, but also performs analytical work on all kinds of high technology materials: ceramics, semiconductor microelectronics, fiber optics... UMass also uses the latest generation EPMA : the SXFive-TACTIS.

    UFRGS, Porto Alegre, Brazil
    The Institute of Geosciences at Federal University of Rio Grande do Sul received one of the first SXFive Electron MIcroprobe in South America, in 2014. Installed in the Department of Geosciences, the instrument is also used for a wide spectrum of material sciences, physics and chemistry research topics.

    Technical University of Clausthal, Germany
    The EPMA department at TU Clausthal is equipped with a SX 100 Electron Microprobe installed in 1996 to replace an aging JEOL JXA-3, and a SXFive installed in 2015.

    Ruhr University Bochum, Germany
    Installed in 2014, a SXFiveFE complements the SX 50 at the Electron Microprobe lab of the Ruhr-University Bochum, a central analytical facility within the Department of Geology, Mineralogy and Geophysics.

    Syracuse University, NY, USA
    The Syracuse University Electron Microprobe Laboratory, located within the Department of Earth Sciences serves as a user facility, encouragings collaborations among students and scientists from many disciplines at institutions and industry in the central New York region, nationally and internationally. It is equipped with a SXFive.

    CAMCOR, University of Oregon, USA
    CAMCOR is a characterization center at the University of Oregon open to outside clients that provides enabling infrastructure for research in chemistry, geology, archaeology, nanoscience, materials science, bioscience, and optics. It is equipped with 2 CAMECA microprobes, a SX 50 and a SX 100.

    University of Arizona, USA
    The Lunar and Planetary Laboratory at University of Arizona received it first CAMECA EPMA (SX 50 model) in 1990. A SX 100 was installed in late February 2010, the older instrument remaining in operation.

    Microanalysis Laboratory at Université de Laval, Quebec, Canada
    The Laboratoire de Microanalyse maintains a CAMECA SX 100 for microanalysis of geological and inorganic materials. The laboratory is available to researchers from Laval and other universities and acts as a regional facility for industrial research...

    R. Castaing Microcharacterization Center, Toulouse, France
    The University of Toulouse III is long term CAMECA EPMA user, with the first MS46 installed in 1973. Two microprobes were acquired simultaneously in 2014 to equip the recently created Centre de microcaractérisation Raimond Castaing, part of the Clément Ader Institute.

    The American Museum of Natural History, New York
    The electron microprobe facility at AMNH is a joint facility shared between the museum and Columbia University's Lamont-Doherty Earth Observatory. Earth scientists at Columbia University can operate the SX Five microprobe from their remote location 18 miles north of New York City by means of a dedicated internet service.

    School of Earth, Atmospheric and Environmental Sciences, The University of Manchester, UK
    The Manchester Electron Microprobe Facility offers a world-class electron beam microanalysis service to NERC funded researchers as well as other United Kingdom workers conducting research in the NERC science area. Those currently making use of the facility include: Igneous and metamorphic petrologists, Sedimentologists, Cosmochemists, Environmental geoscientists, Soil scientists and Science based archaeologists...

    UC Davis - Earth and Planetary Sciences Department, USA
    The Electron Microprobe Laboratory in the Earth and Science Building is equipped with a CAMECA SX 100.

    New Mexico Bureau of Geology & Mineral Resources, USA
    The 'Bureau' is a research and service division of the New Mexico Institute of Mining and Technology (NM Tech). The SX 100 at NM tech is used for a wide range of research projects, mostly in the areas of geology and material science (monazite geochronology, characterization of ore metals and mine dump material...

    Oregon State University, USA
    The SX 100 installed at the Marine Geology and Geophysics facilities within the College of Oceanic & Atmospheric Science also offers remote operational capabilities to Portland State University.

    Wits University, South Africa
    The Microscopy and Microanalysis Unit at the University of the Witwatersrand in Johannesburg, South Africa is equipped with a Field Emission EPMA. The SXFiveFE lab was inaugurated in August 2014.

    University of Johannesburg, South Africa
    The Central Analytical Facility of the Faculty of Science, University of Johannesburg (Spectrum) aims to become an African leader in the analytical field. The SX 100 at Spectrum is used for a wide range of mineralogical and metallurgical applications.

    National Centre for Earth Science Studies (NCESS), Thiruvananthapuram, India
    The SXFive-TACTIS Electron Microprobe installed in March 2020 is applied to a wide range of geological studies including the evolution of the planet Earth and its various solid reservoirs such as the crust, mantle and the core.

    Banaras Hindu University, India
    The SXFive at Electron Probe Microanalysis facility, Banaras Hindu University was installed in 2016. Under leadership from Prof. C. Rao, whse research focuses on igneous petrology, geochemistry, and mineralogy . The tool is also utilized in all fields of research from Botany, Chemistry and Microbiology, to Physics, Metallurgical Engineering, Nanoscience and Nanotechnology.

    Geological Survey of India (GSI)
    GSA has a multiple CAMECA Electron Probe Microanalyzers at its Kolkata, Faridabad, Bengaluru and Hyderabad sites.

    Laboratoire Magmas et Volcans, France
    The Magmas and Volcanoes Laboratory (LMV) is a joint research unit of Clermont-Auvergne University, affiliated with the Centre National de la Recherche Scientifique (CNRS, UMR 6524), the Institut de Recherche pour le Développement (IRD, UMR 163) and Jean Monnet University in Saint Etienne. It is one of two laboratories of the Clermont-Ferrand Global Physics Observatory (OPGC). The LMV is also the Earth Science teaching department of Clermont-Auvergne University. LMV is equipped with the latest generation CAMECA EPMA: the SXFive-TACTIS

    University of Vienna, Austria
    The SXFive-FE at the University of Vienna serves the research activities within the Earth Science departments of the Faculty of Geosciences, Geography and Astronomy. 

    CAMPARIS, Sorbonne University, Paris, France
    World leading laboratory focusing on all aspects of mineralogy, geo/cosmochemistry, environmental studies, CAMPARIS is equipped with SX 100 and SXFive microprobes.

    The Natural History Museum, London, UK
    The Natural History Museum is an international leader in the scientific study of the natural world. Its Mineralogy Department operates a CAMECA SX 100 under leadership from John Spratt. Recent projects have covered a wide range of mineral characterizations including a gem quality scandium end-member thortveitite and a mineral mavlyanovite.

    Links to Microanalysis Societies

    Microbeam Analysis Society
    Formed in 1968, the MAS is an organization of professionals who work with or have an active interest in microbeam instrumentation. The Society provides a forum for members from industrial and academic settings, engaged in research, development, analysis and instrument manufacturing, to exchange ideas and practical experience. It is a sponsor of the annual Microscopy and Microanalysis Conference, and holds workshops with a focus on microanalytical topics

    European Microbeam Analysis Society
    EMAS was founded in 1987 as a scientific society focusing on microbeam analysis methodology. Its primary purposes are education, communication and innovation...

    Groupement National de Microscopie Electronique à Balayage et de MicroAnalyses (GN-MEBA)
    French Scanning Electron Microscopy and Microanalysis Group, formerly group 8 of the ANRT (Association Nationale de la Recherche Technique).

  • Software +

    • Peaksight software

      Specifically developed for CAMECA Electron Probe MicroAnalyzers, PeakSight supports the acquisition and analysis of image, spectral and quantitative data with unique tools and capabilities.

      Keep Reading

  • Upgrade kits +


    Additional Wavelength Dispersive Spectrometers (for instruments equipped with 3 or 4 vertical spectrometers) or additional WDS crytals (for existing spectrometers)
    Increase the analytical range of your instrument with additional spectrometers, equipped with 2 or 4 crystals. Improve detection limits by using a spectrometer with 2 large crystals.  Or add different crystals for increased analytical range or optimized element detection.

    Energy Dispersive Spectrometer (for instruments equipped with motorized optical zoom)
    Detects all elements from B to U in a parallel. Up to 8 EDS channels with « in-situ variable aperture” can be used in addition to WDS in X-ray mapping mode. Use both EDS and WDS calibrations for quantitative analysis.

    TACTIS EDS Hypermap (available for SXFive or SXFiveFE only)
    Collect the full EDS spectrum for each pixel and extract your quantitative resuts simultaneously.
    Available for SXFive & SXFiveFE only.

    BSE low kV detector
    (available for SXFive or SXFiveFE only)
    Achieve superior image quality and identify the area of interest more accurately with the BSE low kV detector (spatial resolution of 15nm or better at 5kV).

    Cathodoluminescence detector (for all instruments)
    Reveal defects and impurities in materials.


    Anticontamination system (for all instruments)
    Reduces carbon contamination of the sample by a factor of 8.

    Airlock-compatible system for transport of sample under vacuum (only for SX100 and Skaphia)
    For air-sensitive samples or radioactive samples

    External Point logger


    Peak Sight Windows™ software upgrade for the CAMECA SX 100 
    For SX 100 and SXFive instruments equipped with PC workstations, Peak Sight updates are possible. Check the latest Peak Sight version available at this link.

    For an SX 100 equipped with a SUN workstation, the upgrade kit includes a PC computer, Peak Sight software for instrument control and data evaluation, training and manuals. This kit is not compatible with the SUN based EDS system.

    TACTIS Touchscreen (available for SXFive or SXFiveFE only)
    Benefit from a dual interface: “Beginner” with touch-screen tool peration and access to simplified options / “Expert” for skilled users. Ideal to make the most of a single tool at multi-user facilities.

    Software modules are available for geology, materials science and metallurgy. Among which:
    • STRATAGem-SX: Easily process data for thin film analysis.
    • Particles search software: Automatically measure each particle of your sample by exporting its coordinates.
    • Geochronology software: Determine a geologically meaningful age by measuring U, Th and Pb using Montel’s formula.

    SX Results/PC-Unix: Peak Sight WindowsTM processing software for SX50/100 data acquired with Unix SXRay100/SXN50 software
    This PC-based software is the processing part comprised in the Windows™ Peak Sight SX 100 automation, plus an import and conversion module in order to accept data acquired with UNIX-based SX100/50 CAMECA software programs. Data issued from any kind of application (Spectrum, Images, Profile...) are handled in a single window. The program can work as a multi-document interface, allowing several data to be displayed simultaneously. It offers full Copy-Paste capabilities with Microsoft Office™ as well as built-in access to Word™ and Excel™ templates for easy, automated generation of analysis reports. 

    The following modules are included: WDS Spectra, Images and Line Profile, Quantitative Data, Phase ID, Phase Class, Profile Off Line, Overlay.
    Optional modules are available for specific applications:

    • option 1: Mapping Quant, Mlayer (multilayer quantification program)
    • option 2: Geo Quant (geological quantitative analysis), Geochronology: Age Dating (Includes Mapping Quant) & Age Map (Age Quant)

    Don't hesitate to contact your local agent or the CAMECA sales department for more information.