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November 2018

Phase change material analysis with Atom Probe
Nanoscale investigation of phase change materials with Atom Probe Tomography
LEAP 4000X Si 3D map showing the redistribution of Ge, Sb, and Te in Sb2Te3-GeTe superlattice. The Sb2Te3-GeTe interfaces are highlighted using an iso-concentration surface of 35 at.% Ge. A high-angle grain boundary with a 65° misorientation angle is shown where the Sb2Te3-GeTe5 phase was detected.

Courtesy of Oana Cojocaru-Mirédin, I. Physikalisches Institut IA, RWTH Aachen University, Germany.