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CAMECA Akonis Metrology Tool Selected by Leading Semiconductor Manufacturer

Wednesday, August 19, 2020

GENNEVILLERS, FRANCE (Aug. 19, 2020) – AMETEK CAMECA, a provider of groundbreaking scientific instrumentation and metrology solutions, is pleased to announce that one of the world’s leading semiconductor players recently selected CAMECA’s cutting-edge metrology solution for one of its fabrication sites.

The selected metrology system, the new AKONIS Secondary Ion Mass Spectrometer, fills a critical gap in semiconductor manufacturing processes by providing high throughput as well as high precision detection for implant profiles, composition analysis, and interfacial data directly in the fab line.

The selection followed an extensive on-site evaluation during which CAMECA’s R&D and application engineers supported the customer’s technology process. AKONIS was chosen for its unique combination of superior analytical capabilities and high level of automation, ensuring repeatability across tools for fab-level process control.

AKONIS offers a robust configuration for the most challenging SiGe / SiP multilayer stack processes, which -- combined with advanced, fab operator friendly software capabilities -- reduces the amount of time it takes to feedback data to the process line by more than 97%.

“CAMECA continues to lead innovation in Secondary Ion Mass Spectrometry,” said Dr. Jesse Olson, CAMECA Business Unit Manager. “We are proud to support key players in semiconductor technology and will continue to further improve our compositional metrology solutions so our customers can better control their next generation device development and manufacturing.”
AKONIS is the culmination of more than 50 years of experience in ion instrumentation and over 30 years of close partnerships with leading semiconductor manufacturers. It complements the CAMECA IMS 7f-Auto, IMS Wf / SC Ultra, as well as the SIMS 4550 (quadrupole SIMS), which are widely adopted by semiconductor characterization labs.

CAMECA® has more than 60 years of experience in the design, manufacture, and servicing of scientific instruments for material micro- and nano-analysis. Since pioneering Electron Probe Microanalysis (EPMA) instrumentation in the 1950s and Secondary Ion Mass Spectrometry (SIMS) in the 1960s, CAMECA has remained the undisputed world leader, while achieving numerous breakthrough innovations in such complementary techniques as Low-energy Electron-induced X-ray Emission Spectrometry (LEXES) and Atom Probe Tomography (APT).

Headquartered near Paris, CAMECA also has a production facility in Madison, WI, and further locations in Brazil, China, England, Germany, India, Japan, Korea, Russia and Taiwan. CAMECA is a business unit of the Materials Analysis Division of AMETEK® Inc., a leading global manufacturer of electronic instruments and electromechanical products with annual sales of approximately $5 billion.

Contact: Marion Chopin, +33 1 43 34 62 50