Upgrade kits for IMS Wf and SC Ultra

Automation & Software - Sources - Airlock - Specimen Chamber

Automation & Software

PC-Automation (Wf/SCU)
PC-Automation system to replace SUN system, allows full automation & unattended operation and greatly improves ease of use.
Please note that most of the upgrade kits listed below can only be installed on IMS Wf  and SC Ultra instruments equipped with PC-Automation.

PC station for off-line data treatement (CAMECA software not included).

Additional PC, keyboard, CAMECA keypad, screens... ensuring optimized operation comfort when the lab is split in two parts.

WinCurve Software (Wf/SCU)
Offers powerful SIMS data processing & graphing capabilities together with easy report creation functionalities.

WinImage Software (Wf/SCU)
Offers powerful SIMS image processing functions, available in Standard or Extended version.

Checkerboard Software Option (Wf/SCU)
Greatly improves the quality of measurements for depth profile applications. For more information, download the technical note "Checkerboard Option" (1.7MB)

Real Time Display software licence providing remote access to all instrumental parameters, thus allowing the operator to remotely tune and run the instrument from his/her own PC.

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Low energy cesium ion source - CLEN 60 Upgrade (Wf/SCU)
With this new high brightness cesium ion source, the IMS Wf/SCU can now perform Extremely Low Impact Depth Profiling and analyse ultra thin layers with nanometer depth resolution.

Dual beam 60 Upgrade (Cs+Xe/O2) V1 & V2 (Wf/SCU)
This kit allows to run the instrument in "co-sputtering" regime, i.e. using  two different ion species for depth profiling.
V1 is available for instruments equipped with the 60° column DUO source, V2 for instruments equipped with a Cs source only.

High brightness RF plasma gas source - RF-PLASMA 36 Upgrade (Wf/SCU)
Compared to conventional DUO-plasmatron, the RF plasma source allows substantial performance improvements using ultra low energy O2 primary beam.

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Automated loading system - CASS-LOAD/FS Upgrade (Wf)
Wafer-loading cassette system with load port for 300mm FOUP. Automated handling of wafers from cassette to sample stage.

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Specimen Chamber

New immersion lens version 2 (Wf/SCU)
Improves overall reliability and facilitates maintenance.

Motorized Z-movement stage - MZMS (Wf/SCU)
Replaces the piezo-stage movement

Eucentric Rotating Stage - RS10 (Wf/SCU with PC-Automation and MZMS)
Minimizes roughening effects which may occur with certain sputtering conditions and matrices.

Turbo Detection (Wf/SCU)
Turbomolecular pump to replace the existing ionic pump. Improves vacuum in the detection system.

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