IMS 7f-Auto

Versatile SIMS Tool: Reference Detection Sensitivity with High Throughput & Full Automation
The IMS 7f-Auto is the latest version of our successful IMS xf Secondary Ion Mass Spectrometer (SIMS) product line. Designed to deliver high precision elemental and isotopic analyses with increased ease-of-use and productivity, it has been optimized for challenging applications such as glass, metals, ceramics, Si-based, III-V and II-VI devices, bulk materials, thin films... fulfilling industry requirements for efficient device development and process control.
  • Product overview +


    Key analytical features for solving a wide range of analytical problems
    The IMS 7f-Auto offers unparalleled depth profiling capabilities with high depth resolution and high dynamic range. The high transmission mass spectrometer is combined with two reactive, high-density ion sources, O2+ and Cs+, thus providing high sputter rate and excellent detection limits. A unique optical design allows both direct ion microscopy and scanning microprobe imaging.

    Improved automation & operation efficiency
    The IMS 7f-Auto is equipped with a redesigned, in-line primary column for easier and faster primary beam tuning and optimized primary beam current stability. New automated routines minimize operator related biases and improve ease-of-use. A motorized storage chamber with automated load / unload of sample holders ensures high throughput through analysis chaining and remote operation.

    High reproducibility at high throughput
    Thanks to its new motorized storage chamber & sample transfer, the IMS 7f-Auto can analyze multiple samples in chained or remote mode. Measurements can be fully unattended and automated, with unequalled throughput and reproducibility. Ultimate reproducibility can be achieved (RSD < 0.5 %), together with excellent detection limits, high throughput and productivity (tool can be used 24h a day with minimum operator intervention).
  • See what the IMS 7f-Auto can do +

  • Download documentation +

  • Scientific publications +


    An Excel spreadsheet compiling scientific research articles using the IMS xf (IMS 3f, 4f, 5f, 6f, 7f, IMS 7f-Auto, IMS 7f-GEO). The articles are ordered by main applications as below and are easily searchable with Excel word search functions:
    • Materials
    • Geosciences
    • Nuclears
    Download speadsheet here

    Do not hesitate to contact us at cameca.info@ametek.com if you can not access some pdf files on your own. You are also more than welcome to send us any missing references, pdf and supplements!
  • Links to IMS users around the world +

    Several hundred CAMECA IMS 6f, 7f, 7f-Auto and 7f-GEO are installed worldwide, the list below is only a very short extract from our customer list!

    Nanoscale Characterization and Fabrication Laboratory, Virginia Tech, USA

    Operated by the University's Institute for Critical Technology and Applied Science (ICTAS), the Nanoscale Characterization and Fabrication Laboratory serves the needs of researchers from VirginiaTech and from the surrounding industrial community, facilitating research in nanoscale engineering and the environment, fuel cells, paleobiology... The NCFL was one the first lab in the world to be equipped with a CAMECA IMS 7f-GEO.

    CalTech Center for Microanalysis, USA

    The Center for Microanalysis at Caltech houses a IMS 7f-GEO and a NanoSIMS 50L, providing expertise for microanalysis of geological, meteoritic and synthetic materials. Research projects carried out at CCM are most varied, ranging from cosmochemistry to experimental studies on climate change, geochronology, in-situ studies of microbial communities, materials science engineering...

    Helmholtz Zentrum Dresden Rossendorf, Germany
    The CAMECA IMS series instrument in Rossendorf is coupled to an accelerator mass spectrometer at the core of the "Super-SIMS" initiative of the Helmholtz Institute Freiberg for Resource Technology.

    University of Manitoba, Manitoba Regional Materials and Surface Characterization Facility, Canada
    Equipped with a CAMECA IMS 7f and several other instruments for materials characterization, the Manitoba Regional Materials and Surface Characterization Facility provides a unique resource to regional government and industrial researchers and enables world-class research into the chemical, structural and morphological nature of surfaces and bulk materials.

    CIM PACA, Arcsis, France

    Located in the South East of France, a basin for semiconductor production, CIM PACA is the flagship characterization platform of ARCSIS, a consortium that unites world-ranking semiconductor groups including Philips, STMicroelectronics, Texas Instruments etc... as well as several dozens of small and mid-size companies, engineering schools, research laboratories and universities of the region. CIM-PACA is dedicated to the design, test and validation of new semiconductor technologies.

    CC-MEM, Institut Jean Lamour / Ecole des Mines de Nancy, France

    The Centre de Compétences en Microscopie Electronique et Microsondes (CC-MEM) is a collaborative research facility hosted by the Ecole des Mines de Nancy. The IMS 7f delivered in 2009 at CC-MEM contributes to cutting-edge research in material sciences, metallurgy, nanosciences.

    Cinvestav, Seccion de electronica del estado solido, Mexico
    Created in 1961, Cinvestav (Advanced Studies Center of the National Polytechnic Institute of Mexico) is a leader institution in research and postgraduate education in Mexico and the world

  • Software +

    • WinCurve dataprocessing sofware
      WinCurve

      Specifically developed for CAMECA SIMS instruments, WinCurve offers powerful data processing & visualization capabilities in a user-friendly environment.

      Keep Reading

    • WinImage Software
      WinImage II

      Specifically developed for CAMECA SIMS instruments, WinImage II offers powerful image visualization, processing & printing capabilities under PC-Windows™ Environment.

      Keep Reading

    • APM Software
      APM

      Automated Particle Measurement (APM) is CAMECA software tool allowing fast screening of millions of particles, particle detection and isotopic characterization.

      Keep Reading

  • Upgrade kits +

    Click on either of the components below to view available options:

    Automation & Software
    Sources
    Airlock
    Specimen Chamber
    Optical System

    Automation & Software

    PC-Automation (6f/7f)
    PC automation system to replace SUN system, allows full automation & unattended operation and greatly improves performance and throughput. For more information.

    Post-treatment Station (6f/7f)
    PC computer for off-line data treatement (CAMECA software not included).

    Desk Control Duplication (7f with PC-Automation)
    Instrument control from an operator room. Ensures optimized operation comfort when the lab is split in two parts.

    APM Software (6f/7f with PC-Automation)
    Automated Particle Measurement software program for fast screening of large numbers of particles and detection of specific elements or isotopes.

    WinCurve Software (6f/7f with PC-Automation)
    Offers powerful SIMS data processing & graphing capabilities.

    WinImage Software (7f with PC-Automation)
    Offers powerful SIMS image processing capabilities (available in Standard or Extended version).

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    Sources

    ISOCMS (6f/7f)
    Isolation and Pumping of the Cesium Microbeam Source.

    DUO-AUTO (6f equipped with Duoplasmatron source)
    Computerised Duoplasmatron Source Control.

    DUO-ACCEL/DECEL (6f/7f)
    Low primary ion energy system for the duoplasmatron source.

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    Airlock

    Fast Airlock (6f)
    For fast sample introduction: reduces sample introduction time by a factor of two to 1'30".

    Storage Chamber Upgrade (6f/7f with PC-Automation)
    Manual storage chamber with its load-lock designed to store up to six sample holders under high vacuum. Ensures substantial throughput improvements for applications that depend on the best UHV conditions. 

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    Specimen chamber

    RS10 Eucentric Rotating Stage (6f/7f)
    Sample rotation is a powerful technique to minimize roughening effects which may occur with certain sputtering conditions and matrices.

    Z-MOTION (6f/7f)
    Z-Axis manual adjustment for the sample stage.

    TURBOPUMP/I (6f)
    Turbomolecular pump for the specimen chamber (to replace ion pump).

    TURBOSPECTRO (7f with PC-Automation)
    Turbomolecular pumps for the mass spectrometer (to replace the existing ion pumps, for optimized pumping speed in the mass spectrometer and improved abundance sensitivity while using the oxygen flooding.

    OFM (6f)
    Oxygen flodding attachment. Improves sensitivity for electropositive elements, improves depth resolution for low impact energy O2+ primary ion sputtering.

    NUMERICAL CAMERA (6f/7f)
    Numerical camera and LED sample illustration system (white light).

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    Secondary Optical System

    RAE (6f/7f)
    Resistive Anode Encoder ion imaging detector to acquire and digitalize ion microscope images in pulse counting mode for 2D or 3D quantitative analysis.

    KPOSTACC (6f/7f)
    Postacceleration for the electron multiplier detector. Increases sensitivity when analysing heavy elements and when running the mass spectrometer at low secondary extraction voltage (<3 kV).

    MDA (6f)
    Motor driven apertures improving long term reproducibility and ease of use.

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