Some of the documents may be downloaded in pdf format (you will simply be requested to fill out our literature download form before you can access the download library for the first time).
The items marked * can be requested by email to cameca.info@ametek.com.
You may also view the list of available product brochures, and visit our 'scientific publications' pages for a selection of research articles by CAMECA instrument users.
Application Notes & Technical Notes: click on your field of interest...
SIMS
Ultra-shallow depth profiling with SIMS*
This contribution examines various aspects of the characterization of thin films, coatings, and diffusion processes with SIMS.
SIMS Analytical Technique for R&D and Process Control of Novel LED Devices*
Quadrupole SIMS 4550
Germanium quantification in strained silicon using the CAMECA Quadrupole SIMS with OCE
> Download pdf (551kB)
Oxynitride metrology using CAMECA Quadrupole SIMS
> Download pdf (730kB)
IMS 7f
Introduction to the SIMS technique and to the IMS 7f model (32 page booklet)*
SIMS for LEDs Application Note (4 pages, August 2011)*
Technical notes:
- Checkerboard option > Download pdf (1.7MB)
- Accel-decel system for the duoplasmatron > Download pdf (320kB)
- Post acceleration system > Download pdf (419kB)
- Eucentric rotating stage > Download pdf (471kB)
- Incidence angle variation > Download pdf (302kB)
CAMECA SIMS applications for photovoltaic technology development. Poster presentation, SIMS XVII Conference, Toronto, sep 2009*
IMS Wf / SC Ultra
Thin Film Metrology and Ultra Shallow Implant Monitoring with EXtreme Low Impact Energy SIMS. (Application Note, September 2010)*
Assessment of SIMS Quantification on the First Few nm for B, P, and As Ultra Shallow Implants. Poster presentation at the 5th international Workshop on High Resolution Depth Profiling Conference, Kyoto, Japan, 2009*
Technical note:
- Checkerboard option > Download pdf (1.7MB)
IMS 1280-HR
- High precision U-Pb dating analyses with the CAMECA IMS 1280. (Poster presentation Goldschmidt conference 2009)*
- Towards an improved IMS 1280 model: the IMS 1280-HR. (Poster presentation Goldscmidt conference 2010)*
NanoSIMS
Microbiology application note: "Quantitative Measurement of Metabolic Activity of Single Microbial Cells in Environmental Samples"
> Download pdf (962kB)
Cell biolology application booket: "Multiple Isotope Mass Spectrometry for simultaneous stable isotope tracer imaging and measurements at subcellular level. A revolution in cellular biology"
> Download pdf (4.2Mb)
Geology & Materials application booklet: "Secondary Ion Mass Spectrometer for trace element and isotope analysis at sub-micron resolution"
> Download pdf (1.9Mb)
EPMA
Trace analysis in various steel specimen*
Trace analysis in various aluminium-magnesium alloys*
Analysis of phosphorus in steel*
WDS mapping of non flat samples*
Accuracy of quantitative analysis on major elements > Download pdf (85kB)
Chemical shifts measurement > Download pdf (215kB)
SXFive crystals and their wavelength coverage > Download pdf (24kB)
Geochronology & EPMA > Download pdf (707kB)
LEXES
Ultra Shallow Dopant Metrology with the CAMECA LEXFAB-300 (Application Note, February 2010)*
Addressing the challenges in elemental composition, thickness determination, and dopant dosimetry from FE to BE. Mona P. Moret et al., Semiconductor Fabtech, 37th edition, June 2008
> Download pdf (198kB)
3D Atom Probe
Nanoscale materials characterization of metals and alloys using Local Electrode Atom Probe
> Download pdf (3.4MB)
Local Electrode Atom Probe Applications in Semiconductors
> Download pdf (9.9MB)