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IMS 7f-Auto

CAMECA’s universal SIMS: reference detection sensitivity with high throughput & full automation

The IMS 7f-Auto is the latest version of our successful IMS xf Secondary Ion Mass Spectrometer product line. Designed to deliver ultimate precision elemental and isotopic analyses with increased ease-of-use and productivity, it has been optimized for challenging applications such as glass, metals, ceramics, Si-based, III-V and II-VI devices, bulk materials, thin films... fulfilling industry requirements for efficient device development and process control.

shallow-implant-metrologyKey analytical features for solving a wide range of analytical problems

The IMS 7f-Auto offers unparalleled depth profiling capabilities with high depth resolution and high dynamic range. The high transmission mass spectrometer is combined with two reactive, high-density ion sources, O2+ and Cs+, thus providing high sputter rate and excellent detection limits. A unique optical design allows both direct ion microscopy and scanning microprobe imaging.

Improved automation & operation efficiency

The IMS 7f-Auto is equipped with a redesigned, in-line primary column for easier and faster primary beam tuning and optimized primary beam current stability. New automated routines for both primary and secondary column tuning minimize operator related biases and improve ease-of-use. A motorized storage chamber with automated load / unload of sample holders ensures high throughput through analysis chaining and remote operation.

IMS 7f-Auto Performance 

Ultimate reproducibility at high throughput

Arsenic reproducibility with IMS 7f-Auto Thanks to its new motorized storage chamber & sample transfer, the IMS 7f-Auto can analyze multiple samples in chained or remote mode, possibly overnight. Measurements can be fully unattended and automated, with unequalled throughput and reproducibility. Ultimate reproducibility on different windows and different holders can be achieved (RSD < 0.5 %, see figure on the right), together with excellent detection limits, high throughput and productivity (tool can be used 24h a day with minimum operator intervention).


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