CAMECA Logo
Worldwide contacts - Service & Support
Search


Home
AMETEK Materials Analysis Division
CAMECA Web Site
WORLD LEADER IN ELEMENTAL & ISOTOPIC MICROANALYSIS
spacer-10pix-high  
Scientific Instruments
for Research

The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMSEPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...

Research 
Metrology Tools
for Semiconductor

CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...

Semiconductor Metrology 


June 2016
CAMECA introduces 3 new instruments. IMS1300

KLEORA

EIKOS

IMS 1300-HR³: the new generation Ultra High Sensitivity SIMS for geosciences.

KLEORA: the specialized Ion Microprobe for advanced mineral dating.

EIKOS™: the accessible Atom Probe for research and industry.

Legendary diamond company De Beers to receive one more CAMECA EPMA. More >>

Come and meet us at: 
AESC 2016, Adelaide, Australia, 26-30 June
Goldschmidt, Yokohama, 26 June - 1 July
Show full schedule >> 
instruments for research - metrology tools - applications - user publications - news - conferences - company - locations
Atom Probe Tomography (APT) - SIMS - EPMA - LEXES
© 2010-2012 AMETEK, Inc - CAMECA SAS. All Rights Reserved - www.ametek.com - www.atomprobe.com
privacy - trademarks - sitemap
Arabic - ChineseJapanese - KoreanPortugueseRussianSpanish