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About CAMECA

Microanalysis ?

Metrology Tools for semiconductors

Scientific Instruments for Research
            Instruments for Earth, Planetary & Solar Sciences.
            Instruments for Research for Semiconductors 
            Instruments for Materials & Nuclear Sciences
            Instruments for Life Sciences 

Analysis Techniques
             EPMA (Electron Probe Micro-Analyzer)
                            Application: mineralogy
                            Application: physical metallurgy
                            Application: glass
                            Comparison: SEM/EDS
             SIMS (Secondary Ion Mass Spectrometry)
                            Static SIMS
                            Dynamic SIMS
             LEXES (Low Energy X-ray Emission Spectrometry)
             LA-WATAP (Tomographic Atom Probe)

             TXRF (Total X-Ray Fluorescence)

News

Publications: pdf and references

Application notes: pdf and references

Contacts: Adresses and contacts of factory, subsidiaries & agents
             Guide to reaching Cameca
             Map of neighbourhood (184kB), general roadmap (330kB)
             French wine guide...               

SX100:      Universal EPMA
                 Instrument synopsis (64kB)
SX100R:    Shielded EPMA for radioactive samples
SX software upgrades
Shallow Probe: LEXES for ULE implants & Ultra thin films
IMS 7f/ 7f-GEO:  Universal magnetic sector SIMS
                 Application and results obtained with a IMS 7f.
IMS 7fR:    Shielded sector SIMS for radioactive samples
Upgrade kits for IMS 4f-5f-6f-7f-1270-1280
IMS Wf - SC Ultra: SIMS for Ultra Low Energy & full wafers
                  Ultra shallow depth profiling                  
                  Deep depth profiling
                  High reproducibility and full wafer mapping
                  Eucentric rotating stage compatible with full wafer
                  New immersion lens for ULE-magnetic sector SIMS
                  Real-time In-situ depth scale measurement
NanoSIMS 50/ 50L: high resolution SIMS microprobe
                  Application: Yttrium-Aluminum garnet 
                  Application: Study on mouse cochlea
IMS 1280:   large radius magnetic sector SIMS for geology
SIMS 4550: Quadrupole SIMS with ULE capabilities
SIMS 4600:
Full-wafer Quad-SIMS with ULE capabilities
LA-WATAP
: Tomographic Atom Probe
TXRF 8300W: Full-wafer Total X-ray Fluorescence for Fabs.

Links to other websites

Events
: conferences and exhibitions