The Shallow Probe model LEXFAB-300 is a turnkey system designed to meet the needs for fully automated semiconductor fab application and currently used for the 90nm, 65nm and 45nm nodes.
The LEXFAB-300:
- gives Elemental Concentration AND Thickness of thin films, layers or ULE implants.
- is designed for Product Wafer analysis (measurement area from 10µm to 100µm) including enhanced Pattern recognition.
- is fully compatible with SMIF 200mm, Open Cassette 200mm and FOUP 300mm standards. SECS/GEM automation.
- meets factory-required host communication protocols. Fully compliant with SEMI standards.
- provides Full Wafer Analysis and Mapping (concentration and thickness uniformity).
- is based on a Non-destructive technique.
- allows a high throughput.
- guarantees a high uptime, reliability and stability, ensuring documented long term tool matching.
- has an easy-to-use User Interface with dedicated recipes.

The Shallow Probe LEXFAB-300 has a huge versatility of applications and is presently applied to:
- B dopant and Ge content in SiGe epilayers
- full wafer dosimetry of low energy ion implantation, plasma doping
- ultra thin films: ALD (atomic layer deposition) oxides, oxynitrides and high-k
- PRAM: nitrogen-doped GST
- metallic and cap layers: Cu, W, Ru, CoWP
- barrier metals: Ti, TiN, Ta, TaN

A new dedicated FAB after sales service organization has been put in operation in order to answer the specific requirements of  manufacturing environment. This new organization has already been successfully deployed in the countries where LEXFAB-300 are presently working in FAB lines.

The CAMECA Shallow Probe is based on the non-destructive Low Energy X-ray Emission Spectrometry (LEXES). CAMECA is the pioneer and world leader in LEXES technology in FABs, based on its recognized knowledge in Electron Probe MicroAnalyzer  (EPMA) and its deep in-house mathematical and physical expertise. 

To get an exciting introduction to the Shallow Probe and its  applications to advanced semiconductor technology, check our application notes and publications pages.