Shallow Depth Profiles with the CAMECA IMS Wf-SC Ultra

The IMS Wf-SC Ultra  demonstrates unrivaled thoughput and sensitivity in this field using: 
- Sub-keV energies for Cs+ and O2+ primary beam
- Medium extraction field in order to combine high sensitivity and high mass resolution performance
- In-situ crater depth measurement for depth scale calibration

High Mass Resolution removes the 30SiH/31P interference, which otherwise would degrade the detection limit of phosphorous.

The High Mass Resolution resolves the 75As/74GeH interference, resulting in a reliable arsenic concentration and shape.

ULE boron dopant profiling in a SiGe box. The large energy acceptance of the CAMECA mass analyzer allows SiGe analysis without problems due  to sample conduction variation.

High precision monitoring of ultra-thin gate oxides using large incidence angle cesium primary beam.