EPMA Applications in Glass: localized quantitative analysis

Elt.
Conc. (wt%)
Norm Conc. (wt%)
Norm Conc. (at%)
Compound
Conc.(wt%)
Mg 
Na 
Si 
F 
Al 
Ca 
K 
S 
P 
Ba 
Ti 
Mn 
Fe 
B 
O
1.43
11.55
30.25
0.33
1.13
5.50
0.83
0.02
0.43
0.06
0.03
0.02
0.07
1.64
47.07
1.43
11.51
30.14
0.32
1.13
5.48
0.83
0.02
0.43
0.06
0.03
0.02
0.07
1.63
46.90
1.19
10.11
21.68
0.35
0.85
2.76
0.43
0.01
0.28
0.01
0.01
0.01
0.03
3.05
59.23
MgO 
Na2O 
SiO2
. 
Al2O3
CaO 
K2O 
SO2
P2O5
BaO 
TiO2
MnO 
FeO 
B2O3
By stoichiometry
2.37
15.57 
64.71
. 
2.14
7.70
1.00
0.04
0.99
0.07
0.05
0.03
0.09
5.27
Total
100.36
100.0
100.0
 
100.36

Quantitative Analysis data output.
Analysis run on the surface of a bulk glass sample (20 mm thick).
Conditions: 15 keV for all elements and 10 keV for boron. Defocused beam (10 µm spot size), carbon coating. Total analysis time: 5 min., using 5 WDS spectrometers in parallel.

Key points:

  • Detection of low concentration elements within 5 minutes acquisition time (thanks to the high peak to background ratio of WDS).
  • High precision (below 1% for some elements) in a short period, and reliable quantification indicated by correct summation at 100 %.
  • Use of different optimum primary energies for given elements in the same quantification.