The precision of quantitation by EPMA and by EDS has been compared on a large number of samples.

Comparison of the performance histograms :

The blue shows the typical scattering of errors on quantitative analysis results reached with the usual "Fitted standards standardless EDS analysis" method. Total error range ~ 140 %.

The yellow represents the scattering of quantitative analysis errors achieved with the X-Phi correction model. It shows the consistency of this correction model with a set of experimental measurement made by WDS. Total error range ~ 14 % = 1/10 of the error range for the EDS histogram!

Conclusion: precision with EPMA is ten time better than with the EDS technique.