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In static SIMS, dedicated to the analysis of the top monolayer, the primary
ion dose is kept below 1E12 ions/cm2 and the mass spectrum reveals
MOLECULAR information. In dynamic SIMS mode, the primary ion dose is not
limited and exceeds 1E12 ions/cm2. In this mode, ELEMENTAL
and ISOTOPIC information can be obtained from the mass spectrum. It allows surface, "bulk"
and 2D/3D analyses.
The ionization yield of most elements
varies by decades, depending on the chemical environment. This property
is used in SIMS instruments to increase the sensitivity of the technique:
a dynamic SIMS instrument must be equipped with Oxygen and Cesium
primary ion beams in order to enhance, respectively, positive and negative
secondary ion intensity by 2 to 3 orders of magnitude compared to the use
of noble gas ions. Oxygen gas can also be flooded onto the surface to oxidize
it and increase positive ion emission.
When sending keV ions onto a solid surface,
(at least !) three phenomena occur simultaneously:
- the sputtering of (mainly) the top monolayer
atoms, induced by the collision cascade,
- the ionization of a small fraction of
the secondary particles,
- the primary ion implantation in the
solid (and associated change of composition, surface work function, etc...).
Starting from the surface (or going through
an interface), the concentration of the implanted primary species (oxygen
or cesium) will vary, then reach an equilibrium (after a few nm, depending
on the conditions). As soon as this is achieved, reliable quantification
is possible with reference standard samples, using Relative Sensitivity
Factors.
One of the main application of dynamic SIMS is the analysis of trace element
depth distribution (for example, dopant in semiconductors). Impact ion
energy is adjusted depending on the applications. Low energy (down to 200-300
eV) is used to reduce atomic mixing due to the collision cascade and improve
depth resolution to the nanometer level. High energy (up to 20-30 keV)
is chosen to go deeper (10-20 microns), faster (µm per min), and
improve detection limits and image resolution.
The CAMECA SIMS are optimized for dynamic SIMS analysis.
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