Most of these documents may be downloaded.
For those documents where the download link is missing, please contact your local agent (for contact details, please refer to our "Contacts" page). You may also send a request to  indicating your field of work, institution/company and we will send you a copy.

EPMA - LEXES / Shallow Probe - Atom Probe - SIMS - QuadSIMS - Magnetic SIMS - NanoSIMS

EPMA

SX100: 20 page brochure.

SX100: Geochronology and EPMA. 4 page flyer (693 kB)

SX Software under Windows^TM environment: 30 page Peak Sight main features booklet. 
Ref: PeakSight_features_MO_CB_2005_53008_002

Typical detection limits in pure Al, Fe and Au specimen (878 kB)
Accuracy of Quantitative analysis on major elements (71kB)
Trace analysis in various steel specimen: Part I (86kB) Part II (76kB)
Trace analysis in various Aluminium-Magnesium alloys (80kB)
Analysis of Phosphorus in Steel  (78kB)
Chemical shifts measurement: Part I  (260kB)  Part II  (185kB)
Quantitative Analysis in presence of peak interference  (81kB)
WDS Mapping of Non Flat Samples (260kB)

On-line Statistical treatment of Quantitative EPMA with the c2-Filter program. Application to Surface EPMA Boron analysis, resolved at ultra low beam energy (1 kV)  (71kB)

SX100_wavelength crystal_coverages  (7kB)
Synopsis of the SX100 (46 kB)

LEXES 

Shallow Probe LEXFAB-300: Metrology Tool for Ultra Low Engery Implants and Thin Films - 6-page flyer, January 2008

General introduction to LEXES (1351kB)

General Application presentation: Full Wafer Analysis of Ion Implanted Wafers and Thin Films by LEXES.

Oxynitride film metrology with the LEXES/Shallow Probe instrument.

Survey of the LEXES /Shallow Probe  Instrument Performance for Arsenic Implant Charaterization and Control.

Slides of the talk given at the annual US-SIMS workshop, Clearwater, FL, May 2002 .

Comparative study of nitrogen quantification in oxynitride films by using LEXES, SIMS & NRA techniques
Slides of the talk given at the annual US-SIMS workshop, Clearwater, FL, May 2002.

3D Atom Probe

(728 ko) LA-WATAP: 6-page brochure. 

(3MB) LA-WATAP: Application poster.

SIMS

Ultra-shallow depth profiling with SIMS (on request)
This contribution examines various aspects of the characterization of thin films, coatings, diffusion processes with SIMS: standard implants in Si like B, As and P, implanted with a few keV to MeV energy are routinely measured with high precision. But with implant energies of 500eV and below, when ultra shallow structures are examined, the desired information is in the first few nm to some tens of nm. This has a great impact on the analytical requirements and quantification procedures.  

QUADRUPOLE SIMS 4550 and 4600 (full wafer)

SIMS 4550: Ge in SiGe using OCE, 2 page application note  (2.3Mb)
SIMS 4550: OxyNitride Metrology using CAMECA quadrupole SIMS, 4 page A.N.  (3.2Mb)
SIMS 4600: 4 page flyer, July 2008 (on request)  

MAGNETIC SECTOR SIMS IMS 4, 5, 6, 7f and 7f-GEO

IMS 7f-GEO: 6 page flyer, January 2008.

IMS 7f: 8 page brochure.

IMS 7f: Introduction to the SIMS technique and to the IMS 7f instrumentation 

Accel/Decel system for the IMS 4, 5, 6 and 7f duoplasmatron (142kB)
Post-acceleration system for the IMS 4, 5, 6 and 7f (3MB)
Eucentric Rotating Stage for the IMS 4, 5, 6 and 7f (2.4MB)
Incident angle variation on the CAMECA IMS 7f (63kB)

Shielded IMS 6fR brochure

MAGNETIC SECTOR SIMS Wf/ SC Ultra

IMS Wf/ SC Ultra: 8-page brochure.

ILSIMS (In-Line SIMS) Semiconductor Equipment Assesment (SEA). Dissemination portfolio.

MAGNETIC SECTOR SIMS IMS 1280

IMS 1280: 12 page brochure.

Improvements in high precision isotopic ratio measurements (slides of SIMS XIV, 177kB)
 
NanoSIMS 50 / 50L
4 page brochure of NanoSIMS 50 in materials and geological science.  (821kB)
4 page brochure of NanoSIMS 50 in biological field. (424kB)

28 page NanoSIMS biological application booklet  (5MB)
16 page NS50/NS50L instrumentation booklet  (1MB)
20 page NanoSIMS materials/geology application booklet  (2.2MB)

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