July 2018

 
CAMECA Calendar Competition: 3D Atom Probe Tomography reconstruction of fins
3D Atom Probe Tomography reconstruction of fins
A CAMECA LEAP 5000 XS and the Integrated Visualization & Analysis Software (IVAS 3.8) were used to reconstruct a multilayer Si/SiGe device. APT provides unprecedented 3D data which is very challenging to obtain with other techniques. Distortions in the left image arise due to deviations in the tip shape during the run. These distortions are corrected using the landmark reconstruction feature in IVAS 3.8 which flattens selected interfaces.

Image submitted by Will Brewer, University of Florida, USA.