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Trace Element Mapping

Small area analysis in Sn/Cu wire structure

The CAMECA IMS 7f-Auto provides high (sub-micron) lateral resolution, which is of great interest for material analysis. Its outstanding imaging capabilities are applied to studies on a wide variety of materials: diffusion phenomena in polycrystalline samples, surface imaging analysis in alloys...
For ion imaging, two operating modes are available:

  • Direct Ion Imaging (“Microscope”) mode to acquire images up to a thousand times faster than with any scanning ion microprobe (all pixels are acquired in parallel). Optimized for «large» area mapping.
  • Scanning Ion Image (“Microprobe”) mode for a few hundreds of nanometers lateral resolution with O2+ and Cs+ beam. Dedicated to small area analysis.

Small area analysis: both in-depth and lateral information

Depth profile reconstruction from ion images

Small area analysis in Sn/Cu wire structure: the images on the left side were acquired for different species using the microprobe mode.
Using the CAMECA WinImage software, it is possible to obtain a retrospective depth profile: in the above example, a depth profile (right side) was obtained from the ion images (central area, left side) which were recorded sequentially while sputtering in-depth. Note the high dynamic range in imaging mode.




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