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3D Atom Probe Analysis of Magnetostrictive Materials

3D reconstruction and interface analysis of a TbCo2 / Fe multilayer structure

Thanks to laser pulsing, the 3D Atom Probe is capable of analyzing brittle materials, e.g. multilayer structures with a good throughput. Indeed, the absence of HV pulsing reduces the mechanical stress (fatigue) on the tip and thus minimizes the risk of sample rupture during analysis. Hereunder is an example of brittle material analysis with 3D Atom Probe.

TbCo2/Fe multilayer: SEM imageLeft: SEM image of a TbCo2/Fe magnetostrictive multilayer. The sample is prepared as a tip by Focused Ion Beam. The multilayer structure is recognizable on the upper part of the specimen.

Below: 3D mappings of Co (left), Tb (middle) and Fe atoms (right) in the probe volume. The multilayer structure of the sample is clearly visible in these 3D reconstructions.

TbCo2/Fe multilayer: 3D reconstructions
Thanks to the unique in-depth resolution of the CAMECA Atom Probe, the 3D reconstruction of the multilayer structure allows the investigation of the interfaces.

TbCo2 / Fe multilayer: Composition profileThe concentration depth profile performed along the analysis direction (depth direction) clearly reveals differences between the interfaces (dissymmetrical interfaces): the Fe/TbCo2 interface (1nm thick) is thinner than the Fe/Co interface. This effect is attributed to Fe/Co interdiffusion controlled by the establishment of the Tb layer.
Data by courtesy of GPM-Rouen University, France.

Compared to other analytical techniques and instruments, the CAMECA Atom Probe offers 4 main advantages for the analysis of multilayers and interfaces:

  • Direct quantitation without standard (ionization is 100% for all elements)
  • No matrix effect nor interface artifact, common in SIMS for high atomic concentrations
  • Excellent depth resolution (0.1-0.2nm)
  • Analysis localized at nanometer scale revealing local inhomogenities.

CAMECA 3D Atom Probes



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