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WORLD LEADER IN ELEMENTAL & ISOTOPIC MICROANALYSIS
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Scientific Instruments
for Research

The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMSEPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...

Research 
Metrology Tools
for Semiconductor

CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...

Semiconductor Metrology 
Save the date for our 2017 Atom Probe User's Meeting in Madison, WI, USA next June 12-15.

Jan 2017: China Institute of Atomic Energy selects SKAPHIA Shielded Electron Microprobe. More>>

Aug 2016: AMETEK acquires Nu Instruments, now part of the CAMECA business unit.

Learn more on 2016 launched instruments:  IMS 1300-HR³ and KLEORA, new UHS SIMS for geoscience & geochronology; EIKOS™, new Atom Probe for research and industry.

Come and meet us at: 
EGU 2017, booth 64, Vienna, Austria, 23-28 April
View full conference schedule >> 
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Atom Probe Tomography (APT) - SIMS - EPMA - LEXES - ICP-MS - GD-MS - TIMS

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