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AMETEK Materials Analysis Division
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WORLD LEADER IN ELEMENTAL & ISOTOPIC MICROANALYSIS
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Scientific Instruments
for Research

The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMSEPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...

Research 
Metrology Tools
for Semiconductor

CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...

Semiconductor Metrology 
Oct 4: CAMECA launches the SKAPHIA Shielded Electron Probe Initiative.

Aug 4: AMETEK acquires Nu Instruments, now part of the CAMECA business unit.


Spring 2016: CAMECA launches 3 new instruments. IMS1300

KLEORA

EIKOS

Learn more on IMS 1300-HR³ and KLEORA, our new UHS SIMS for geoscience & geochronology; EIKOS™, the new Atom Probe for research and industry.

Come and meet us at: 
AGU, San Francisco, 12-16 Dec 
View full conference schedule >> 
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Atom Probe Tomography (APT) - SIMS - EPMA - LEXES - ICP-MS - GD-MS - TIMS

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