The reference in micro- and nano-analysis

Metrology Tools for Semiconductors 

CAMECA provides in-Fab and near-Fab Metrology Equipment for the worldwide semiconductor, based on LEXES, SIMS and TXRF analytical techniques. CAMECA also provides advanced Research Instruments for the most prestigious laboratories in universities, governmental organizations and private companies in materials, geology, astrophysics, semiconductors and life sciences. The techniques include EPMA, SIMS and Atom Probe.

CAMECA's headquarters are located near Paris, and we have subsidiaries in the USA, Japan, Korea, Taiwan and Germany. We have been at the forefront of technological innovation for more than 50 years, and over 1,000 of our instruments are installed worldwide.

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CAMECA is part of  AMETEK Inc. Materials Analysis Division.e Isotope Mass Spectrometry, LEXES Low Energy X-ray Emission Spectrometry, EPMA Electron Probe Micro-analysis, TAP and WATAP Tomographic Atom Probe, TXRF Total X-ray fluorescence,  WDS Wavelength Dispersive Spectrometry, Elemental analysis, Isotopic analysis, Magnetic sector mass analyser, Quadrupole mass analyser, Dynamic SIMS, Static SIMS, Trace element Depth profiling, Ion microscopy.  Instruments: IMS 7f, IMS 1280, NanoSIMS 50,  IMS Wf, SC Ultra, SX 100, Shallow Probe, SP75, SP300,  LEXFAB-300, OTAP, WATAP, quad SIMS 4550, quad SIMS 4600, TXRF 8300W.
Metrology for semiconductors: dopant dose measurement, implant dose mapping, dopant depth profiling,  Ultra Shallow implant, oxynitride,  full wafer analysis, 200 mm wafer, 300 mm wafer. Nanotechnology, Material Science, Metallurgy, Geology, Cosmochemistry, Astrophysics, Cell Biology.