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WORLD LEADER IN ELEMENTAL & ISOTOPIC MICROANALYSIS
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Scientific Instruments
for Research

The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMSEPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...

Research 
Metrology Tools
for Semiconductor

CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...

Semiconductor Metrology 

CAMECA unveils EIKOS™, the new atom probe for research & industry.EIKOS

EIKOS provides accessibility to atom probe tomography with increased ease of use and a low cost of ownership. More >>

Join us at Goldschmidt booth#41 and attend our Tuesday 28th luncheon! More >>
 
Legendary diamond company De Beers to receive one more CAMECA EPMA. More >>

Come and meet us at: 
AESC 2016, Adelaide, Australia, 26-30 June
Goldschmidt, Yokohama, 26 June - 1 July
Show full schedule >> 
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Atom Probe Tomography (APT) - SIMS - EPMA - LEXES
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