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WORLD LEADER IN ELEMENTAL & ISOTOPIC MICROANALYSIS
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Scientific Instruments
for Research

The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMSEPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...

Research 
Metrology Tools
for Semiconductor

CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...

Semiconductor Metrology 
Recent news,
Upcoming events...


CAMECA invites to 1st South-American Workshop on Electron Probe MicroAnalysis. More>>

3D Atom Probe and NanoSIMS to support minerals & energy research in Australia. More>>

Recent Nature Geoscience article reports on 4.4 billion year old zircon dating by Atom Probe Tomography. More>>

Come and meet us at:
EGU, Vienna, Austria, 27 April - 2 May
IMTCE, Kuala Lumpur, Malaysia, 13-16 May
SIMS Workshop, National Harbor, MD, USA, 27-30 May
SEM 2014, Chernogolovka, Russia, 2-7 June
Show full schedule>> 
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Atom Probe Tomography (APT) - SIMS - EPMA - LEXES
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