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Scientific Instruments
for Research
The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMS, EPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...
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Metrology Tools
for Semiconductor
CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...
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Recent news,
Upcoming events...
IGGCAS (Institute of Geology & Geophysics, Chinese Academy of Science) orders an IMS 1280-HR to complement the IMS 1280 and NanoSIMS 50L already in operation in Beijing. More>>
SXFiveFE: live demo season of our new Field Emission EPMA to start in Madison, WI, USA. More>>
Inauguration of the first Local Electrode Atom Probe in Switzerland. More>>
Come and meet us at:
ACMM 22, Feb 5-9, Perth, Australia
SEMICON Korea, Feb 7-9, Seoul, Korea
EMPG, March 4-7, Kiel, Germany
TMS, March 11-15, Olrando, FL, USA
Full show schedule>>
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