 |
Scientific Instruments
for Research
The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMS, EPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...
|
|
 |
|
Metrology Tools
for Semiconductor
CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...
|
|
|
|
Recent news,
Upcoming events...
|
|
Two articles in NATURE report on the successful use of NanoSIMS in cell biology. More>>
IGGCAS (Institute of Geology & Geophysics, Chinese Academy of Science) orders an IMS 1280-HR to complement the IMS 1280 and NanoSIMS 50L already in operation in Beijing. More>>
Come and meet us at:
24th SIMS, Philadelphia, USA, May 14-18
E-MRS, Strasbourg, France, May 14-18
Full show schedule>>
|
|