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AMETEK Materials Analysis Division
CAMECA Web Site
WORLD LEADER IN ELEMENTAL & ISOTOPIC MICROANALYSIS
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Scientific Instruments
for Research

The CAMECA instruments provide elemental and isotopic composition data from micron down to sub-nanometer scale and equip the most prestigious government and university labs as well as leading high tech industrial companies around the world.
Analytical techniques include SIMSEPMA and 3D Atom Probe, applications are most diverse: Earth & Planetary Sciences, Materials, Semiconductors, Life Sciences...

Research 
Metrology Tools
for Semiconductor

CAMECA develops in-fab and near-fab metrology equipment based on the LEXES and SIMS analytical techniques.
Our tools have been adopted by top semiconductor manufacturers worldwide and address major thin film and new material process control issues including: elemental composition and thickness in substrates, thin or thick multilayers, ULE implants, dopant dosimetry...

Semiconductor Metrology 
Introducing LEAP 5000 
CAMECA has delivered its newest, cutting edge Atom Probe Microscope: more than 40% extra atoms detected per nm3 analyzed! Learn more on LEAP 5000 >>

Come and meet us at: 
IGRDM 18, Miyazaki, Japan, 23-28 Nov
Matériaux, Montpellier, France, 24-28 Nov
SSSJ, Miyazaki, Japan, 28 Nov
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Atom Probe Tomography (APT) - SIMS - EPMA - LEXES
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